waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SU-8 | Silicon Dioxide (SiO₂) | 1.621 | 0.892 | -10 | 104.400002 | 5 | 0.000012 | 0.27 | 1.4883 | 1.24838 | 2.2 | 3.411 | 1.5596 | 1.56915 | 0.000083 | 86.260002 | 54.099998 | 0 | 5.25 | 4.92 | 5.03 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.7 |
SU-8 | Air | 0.626 | 0.971 | 13.1 | 154.300003 | 1 | 0.000011 | 0.27 | 1.41435 | 1.4705 | 0.333 | 1.158 | 1.63118 | 1.63538 | 0.00003 | 72.190002 | 70.720001 | 0.000005 | 4.35 | 4.2 | 4.01 | 1,260 | 1,625 | FDTD | 3.49 |
SU-8 | Air | 1.086 | 0.882 | 15.2 | 155.699997 | 5 | 0.000011 | 0.21 | 1.46964 | 1.12598 | 0.716 | 2.108 | 1.47327 | 1.47821 | 0.000035 | 80.769997 | 44.84 | 0.000001 | 4.94 | 4.76 | 4.46 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.06 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.952 | 0.433 | -27.799999 | 150.600006 | 10 | 0.000001 | 1.43 | 1.85976 | 1.04194 | 1.388 | 1.907 | 1.52717 | 1.53312 | 0.000033 | 55.349998 | 59.740002 | 0.000002 | 4.52 | 4.22 | 4.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.47 |
SU-8 | Silicon Dioxide (SiO₂) | 1.193 | 0.971 | 7.3 | 164.399994 | 5 | 0.000007 | 0.29 | 1.66498 | 1.30614 | 0.449 | 1.38 | 1.85801 | 1.86215 | 0.000026 | 82.709999 | 38.34 | 0.000002 | 1.51 | 1.22 | 1.33 | 1,260 | 1,625 | FDTD | 1.08 |
SU-8 | Air | 1.58 | 0.733 | 17.799999 | 191.300003 | 10 | 0.000007 | 0.27 | 1.7193 | 1.48252 | 1.895 | 2.715 | 1.73263 | 1.73801 | 0.000031 | 68.199997 | 48.02 | 0.000004 | 7.75 | 7.48 | 7.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.18 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.517 | 0.43 | -45.799999 | 154.699997 | 1 | 0.000014 | 0.2 | 1.77056 | 1.07095 | 1.322 | 1.488 | 1.43621 | 1.44464 | 0.000042 | 71.839996 | 89.029999 | 0.000003 | 2.53 | 2.12 | 2.36 | 1,260 | 1,625 | FDTD | 4.75 |
Polymethyl Methacrylate (PMMA) | Air | 1.737 | 0.618 | 9.7 | 95.5 | 10 | 0.000009 | 0.24 | 1.57497 | 1.02585 | 1.069 | 2.199 | 1.80758 | 1.81105 | 0.00004 | 59.220001 | 89.980003 | 0.000004 | 1.13 | 0.7 | 0.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.85 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.595 | 0.726 | 6.5 | 140.399994 | 10 | 0.000121 | 0.17 | 1.69349 | 1.06595 | 1.126 | 2.082 | 1.66385 | 1.66667 | 0.000021 | 54.740002 | 94.730003 | 0.000001 | 1.22 | 0.91 | 1.08 | 1,260 | 1,625 | FDTD | 0.13 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.521 | 0.204 | -35.700001 | 126.599998 | 1 | 0.000166 | 0.18 | 1.46496 | 1.39631 | 1.74 | 1.982 | 1.61836 | 1.6279 | 0.000059 | 87.470001 | 49.610001 | 0.000002 | 7.27 | 6.98 | 6.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.4 |
Silicon Nitride (Si₃N₄) | Air | 1.016 | 0.883 | -34 | 186.600006 | 1 | 0.000003 | 15.28 | 1.64234 | 1.10928 | 1.762 | 2.158 | 1.80515 | 1.81082 | 0.000026 | 77.32 | 72.309998 | 0.000002 | 1.63 | 1.51 | 1.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.4 |
Polydimethylsiloxane (PDMS) | Air | 0.543 | 0.979 | -23.4 | 160.5 | 1 | 0.000185 | 0.16 | 1.51564 | 1.16193 | 1.717 | 3.055 | 1.48055 | 1.48797 | 0.00004 | 69.260002 | 72.980003 | 0.000002 | 8.37 | 7.87 | 8.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.59 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.351 | 0.476 | 3.5 | 83.699997 | 10 | 0.000009 | 0.22 | 1.67641 | 1.32585 | 1.415 | 1.659 | 1.61078 | 1.61926 | 0.000106 | 68.800003 | 12.83 | 0.000001 | 7.68 | 7.21 | 7.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.58 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.636 | 0.509 | -6.3 | 127.599998 | 10 | 0.000003 | 17.280001 | 1.88261 | 1.48825 | 0.765 | 1.004 | 1.70282 | 1.70502 | 0.000016 | 89.57 | 55.060001 | 0.000002 | 9.89 | 9.43 | 9.55 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.82 |
Polymethyl Methacrylate (PMMA) | Air | 0.737 | 0.513 | 15 | 102.400002 | 5 | 0.000014 | 0.22 | 1.8625 | 1.49959 | 1.099 | 2.272 | 1.9385 | 1.94172 | 0.000037 | 72.379997 | 24.83 | 0.000005 | 5.77 | 5.55 | 5.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.78 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.019 | 0.247 | -39.299999 | 199.899994 | 5 | 0.000003 | 18.799999 | 1.62357 | 1.48755 | 2.851 | 3.203 | 1.66852 | 1.67328 | 0.00002 | 88.059998 | 37.43 | 0 | 5.3 | 4.83 | 5.14 | 1,260 | 1,625 | FDTD | 0.3 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.851 | 0.984 | -25 | 159.899994 | 5 | 0.000278 | 0.17 | 1.90737 | 1.08455 | 1.194 | 1.89 | 1.45384 | 1.46163 | 0.000042 | 79.32 | 96.489998 | 0.000005 | 1.89 | 1.53 | 1.73 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.2 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.964 | 0.57 | 16.700001 | 94.599998 | 5 | 0.000012 | 0.21 | 1.98655 | 1.42679 | 1.576 | 2.14 | 1.62742 | 1.63307 | 0.000073 | 84.050003 | 44.07 | 0.000005 | 5.04 | 4.94 | 4.59 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.59 |
SU-8 | Air | 0.989 | 0.235 | 5.4 | 171.100006 | 10 | 0.000009 | 0.28 | 1.68582 | 1.22112 | 2.987 | 4.478 | 1.48263 | 1.49125 | 0.000052 | 54.599998 | 82.470001 | 0.000004 | 8.11 | 7.7 | 7.99 | 1,260 | 1,625 | FDTD | 0.89 |
Polydimethylsiloxane (PDMS) | Air | 1.96 | 0.405 | -48.5 | 161.399994 | 1 | 0.000147 | 0.15 | 1.74759 | 1.45626 | 0.663 | 1.194 | 1.62476 | 1.63132 | 0.000031 | 76.540001 | 24.15 | 0.000002 | 8.22 | 7.8 | 7.8 | 1,260 | 1,625 | FDTD | 0.32 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.654 | 0.51 | -41.799999 | 126.900002 | 10 | 0.000001 | 1.4 | 1.74841 | 1.03004 | 2.743 | 2.896 | 1.92992 | 1.93281 | 0.000017 | 86.800003 | 23.07 | 0.000003 | 3.64 | 3.41 | 3.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.13 |
Silicon Nitride (Si₃N₄) | Air | 1.849 | 0.935 | -16.1 | 137.100006 | 1 | 0.000003 | 16.540001 | 1.62606 | 1.16483 | 0.117 | 0.463 | 1.67745 | 1.68068 | 0.000021 | 70.889999 | 83.129997 | 0.000002 | 2.62 | 2.36 | 2.2 | 1,260 | 1,625 | FDTD | 4.52 |
Silicon Dioxide (SiO₂) | Air | 1.098 | 0.744 | -48 | 87 | 5 | 0.000001 | 1.45 | 1.8767 | 1.14432 | 1.539 | 2.126 | 1.98667 | 1.99043 | 0.000028 | 63.740002 | 22.450001 | 0.000005 | 9.52 | 9.03 | 9.04 | 1,260 | 1,625 | FDTD | 1.74 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.966 | 0.376 | -41.200001 | 122.400002 | 5 | 0.000001 | 1.46 | 1.68287 | 1.09625 | 2.418 | 2.895 | 1.90985 | 1.91471 | 0.00003 | 89.389999 | 28.25 | 0.000004 | 6.18 | 5.84 | 5.81 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.08 |
Silicon Dioxide (SiO₂) | Air | 1.761 | 0.62 | -34.700001 | 168.300003 | 10 | 0.000001 | 1.5 | 1.73765 | 1.23788 | 0.63 | 1.189 | 1.87374 | 1.87895 | 0.000026 | 52.349998 | 55.689999 | 0.000004 | 5.57 | 5.37 | 5.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.23 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.86 | 0.926 | -10.9 | 169.600006 | 10 | 0.000133 | 0.15 | 1.79403 | 1.41172 | 2.657 | 3.709 | 1.53581 | 1.53908 | 0.000018 | 63.450001 | 75.879997 | 0.000004 | 5.57 | 5.31 | 5.13 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.57 |
SU-8 | Air | 1.849 | 0.263 | -44.400002 | 185 | 10 | 0.000008 | 0.24 | 1.52989 | 1.26156 | 2.577 | 3.188 | 1.87822 | 1.88809 | 0.000043 | 79.93 | 91.019997 | 0 | 5.01 | 4.56 | 4.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.33 |
Silicon Dioxide (SiO₂) | Air | 0.562 | 0.875 | 18.700001 | 170.800003 | 1 | 0.000001 | 1.48 | 1.80617 | 1.34637 | 1.29 | 2.601 | 1.46071 | 1.46598 | 0.000035 | 84.209999 | 91.400002 | 0.000001 | 8.85 | 8.7 | 8.68 | 1,260 | 1,625 | FDTD | 0.35 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.083 | 0.232 | 11.7 | 167.899994 | 5 | 0.000001 | 1.49 | 1.42412 | 1.44267 | 0.388 | 0.672 | 1.95169 | 1.96011 | 0.000054 | 78.720001 | 26.889999 | 0 | 0.95 | 0.64 | 0.7 | 1,260 | 1,625 | FDTD | 3.63 |
Silicon Dioxide (SiO₂) | Air | 0.633 | 0.991 | -5 | 122.5 | 10 | 0.000001 | 1.32 | 1.42788 | 1.00524 | 0.455 | 1.711 | 1.99125 | 1.99579 | 0.000036 | 69.290001 | 52.98 | 0.000003 | 2.13 | 1.92 | 1.66 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.87 |
Polymethyl Methacrylate (PMMA) | Air | 0.618 | 0.863 | -19.4 | 98.300003 | 5 | 0.000015 | 0.21 | 1.79947 | 1.06494 | 2.274 | 3.359 | 1.66289 | 1.66393 | 0.000009 | 79.610001 | 53.599998 | 0.000003 | 4.25 | 4.06 | 4.11 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.09 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.514 | 0.907 | -26 | 137.399994 | 5 | 0.000218 | 0.17 | 1.90221 | 1.45649 | 1.347 | 2.402 | 1.91403 | 1.92334 | 0.000057 | 82.400002 | 60.450001 | 0.000005 | 8.14 | 8.01 | 7.85 | 1,260 | 1,625 | FDTD | 0.69 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.75 | 0.706 | -3.9 | 126.699997 | 10 | 0.000003 | 19.950001 | 1.40999 | 1.48255 | 0.293 | 0.833 | 1.62418 | 1.62666 | 0.000019 | 59 | 75.449997 | 0.000002 | 0.64 | 0.36 | 0.43 | 1,260 | 1,625 | FDTD | 0.91 |
SU-8 | Silicon Dioxide (SiO₂) | 1.481 | 0.344 | -13.9 | 114.699997 | 5 | 0.000008 | 0.24 | 1.76373 | 1.01977 | 1.48 | 2.63 | 1.44683 | 1.45412 | 0.000057 | 85.449997 | 64.099998 | 0.000003 | 2.07 | 1.81 | 1.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.55 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.326 | 0.285 | -1.5 | 170 | 10 | 0.000001 | 1.44 | 1.5551 | 1.44417 | 1.375 | 2.708 | 1.44544 | 1.45272 | 0.000042 | 60.740002 | 43.91 | 0.000001 | 4.86 | 4.51 | 4.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.07 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.61 | 0.925 | -17.6 | 196 | 5 | 0.000001 | 1.45 | 1.47044 | 1.10353 | 2.863 | 3.082 | 1.4729 | 1.47953 | 0.000031 | 50.84 | 73.330002 | 0.000005 | 1.54 | 1.1 | 1.33 | 1,260 | 1,625 | FDTD | 3.39 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.217 | 0.792 | -12.1 | 163.699997 | 1 | 0.000196 | 0.19 | 1.79649 | 1.00526 | 1.617 | 1.791 | 1.89049 | 1.89471 | 0.000024 | 52.470001 | 70.830002 | 0.000004 | 5.69 | 5.22 | 5.31 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.3 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.498 | 0.993 | 5.2 | 181.699997 | 10 | 0.000009 | 0.25 | 1.46185 | 1.22441 | 1.9 | 2.878 | 1.8294 | 1.83548 | 0.000034 | 65.18 | 29.469999 | 0.000002 | 3.66 | 3.19 | 3.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.4 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.899 | 0.618 | 0.7 | 148.800003 | 5 | 0.000003 | 19.110001 | 1.95829 | 1.48515 | 1.201 | 1.9 | 1.59035 | 1.59255 | 0.000015 | 62.700001 | 31.5 | 0.000003 | 7.88 | 7.6 | 7.66 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.78 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.99 | 0.368 | 17 | 127.800003 | 1 | 0.000001 | 1.38 | 1.93644 | 1.4741 | 1.907 | 2.632 | 1.51292 | 1.52052 | 0.000069 | 83.410004 | 23.290001 | 0.000002 | 0.79 | 0.61 | 0.5 | 1,260 | 1,625 | FDTD | 1.15 |
Silicon Nitride (Si₃N₄) | Air | 1.525 | 0.523 | -13 | 192 | 5 | 0.000003 | 17.370001 | 1.87648 | 1.46492 | 0.382 | 0.831 | 1.93657 | 1.9438 | 0.000035 | 87.169998 | 28.709999 | 0.000004 | 1.54 | 1.2 | 1.13 | 1,260 | 1,625 | FDTD | 3.07 |
Polymethyl Methacrylate (PMMA) | Air | 1.909 | 0.239 | -44 | 135.100006 | 1 | 0.000012 | 0.25 | 1.42542 | 1.0468 | 2.126 | 2.599 | 1.50048 | 1.50744 | 0.000039 | 52.959999 | 33.98 | 0 | 2.27 | 1.96 | 1.97 | 1,260 | 1,625 | FDTD | 3.32 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.3 | 0.207 | -32.900002 | 82.400002 | 1 | 0.000209 | 0.2 | 1.62773 | 1.33895 | 0.754 | 1.123 | 1.53144 | 1.54072 | 0.00008 | 52.25 | 61.860001 | 0 | 1.6 | 1.29 | 1.33 | 1,260 | 1,625 | FDTD | 3.36 |
Polydimethylsiloxane (PDMS) | Air | 1.197 | 0.247 | -11.4 | 106.5 | 10 | 0.00029 | 0.19 | 1.4835 | 1.19745 | 2.826 | 3.665 | 1.40498 | 1.41108 | 0.000052 | 65.059998 | 61.810001 | 0.000004 | 6.8 | 6.5 | 6.67 | 1,260 | 1,625 | FDTD | 3.03 |
Polymethyl Methacrylate (PMMA) | Air | 1.89 | 0.808 | -17.6 | 158.699997 | 10 | 0.000013 | 0.23 | 1.8388 | 1.19043 | 1.889 | 3.387 | 1.94729 | 1.95701 | 0.000055 | 71.080002 | 53.639999 | 0.000002 | 8.54 | 8.05 | 8.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.27 |
Silicon Nitride (Si₃N₄) | Air | 1.458 | 0.218 | -13.3 | 197.800003 | 10 | 0.000003 | 16.52 | 1.82728 | 1.05365 | 1.876 | 2.4 | 1.91878 | 1.92476 | 0.000028 | 82.57 | 70.959999 | 0.000004 | 6.32 | 6.11 | 5.96 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.55 |
Silicon Nitride (Si₃N₄) | Air | 0.532 | 0.892 | -30.799999 | 128.300003 | 10 | 0.000003 | 19.93 | 1.68882 | 1.48375 | 2.036 | 3.286 | 1.77294 | 1.77506 | 0.000013 | 85.449997 | 25.540001 | 0.000003 | 3.17 | 3.06 | 2.88 | 1,260 | 1,625 | FDTD | 0.27 |
Silicon Dioxide (SiO₂) | Air | 1.127 | 0.464 | -0.7 | 177.600006 | 1 | 0.000001 | 1.5 | 1.67581 | 1.24357 | 0.618 | 2.061 | 1.49055 | 1.49249 | 0.000011 | 50.939999 | 19.959999 | 0.000002 | 2.85 | 2.36 | 2.46 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.92 |
Silicon Dioxide (SiO₂) | Air | 0.505 | 0.758 | -42.599998 | 169.800003 | 5 | 0.000001 | 1.36 | 1.69691 | 1.17365 | 1.013 | 1.837 | 1.4902 | 1.4917 | 0.000007 | 78.540001 | 75.540001 | 0.000001 | 4.76 | 4.44 | 4.62 | 1,260 | 1,625 | FDTD | 4.34 |
Silicon Dioxide (SiO₂) | Air | 1.683 | 0.961 | -11 | 108.400002 | 1 | 0.000001 | 1.43 | 1.69233 | 1.29153 | 2.898 | 3.072 | 1.88116 | 1.8837 | 0.000021 | 76.040001 | 59.610001 | 0.000004 | 0.82 | 0.52 | 0.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.65 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.54 | 0.203 | -24.9 | 160.699997 | 5 | 0.000015 | 0.21 | 1.88352 | 1.08058 | 1.67 | 2.161 | 1.4124 | 1.42108 | 0.000047 | 53.66 | 65.25 | 0.000004 | 5.29 | 5.05 | 4.95 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.38 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.731 | 0.758 | 0.8 | 120.400002 | 10 | 0.00001 | 0.23 | 1.44432 | 1.47998 | 2.266 | 2.76 | 1.75105 | 1.76084 | 0.000082 | 57.150002 | 61.419998 | 0.000004 | 9.09 | 8.69 | 8.84 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.34 |
SU-8 | Silicon Dioxide (SiO₂) | 0.927 | 0.782 | -46.799999 | 125.599998 | 1 | 0.000007 | 0.22 | 1.78097 | 1.38236 | 1.376 | 1.524 | 1.60759 | 1.61399 | 0.000037 | 72.150002 | 84.82 | 0.000004 | 8.26 | 7.97 | 8.13 | 1,260 | 1,625 | FDTD | 2.75 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.47 | 0.823 | 9.9 | 146.699997 | 1 | 0.000012 | 0.23 | 1.79979 | 1.0267 | 1.508 | 2.384 | 1.49807 | 1.50196 | 0.000028 | 57.700001 | 26.459999 | 0.000002 | 2.46 | 2.24 | 2.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.86 |
Polymethyl Methacrylate (PMMA) | Air | 0.709 | 0.894 | 7.4 | 118.599998 | 10 | 0.000014 | 0.22 | 1.56773 | 1.1242 | 1.789 | 2.317 | 1.67019 | 1.67953 | 0.000084 | 50.919998 | 15.84 | 0.000001 | 6.13 | 5.87 | 5.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.85 |
Silicon Dioxide (SiO₂) | Air | 1.929 | 0.947 | 15.3 | 93 | 10 | 0.000001 | 1.37 | 1.52078 | 1.44539 | 0.5 | 1.187 | 1.73958 | 1.74071 | 0.000015 | 50.009998 | 60.310001 | 0.000001 | 5.79 | 5.36 | 5.44 | 1,260 | 1,625 | FDTD | 4.98 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.228 | 0.277 | 4 | 157.5 | 5 | 0.0002 | 0.16 | 1.58114 | 1.30258 | 2.033 | 2.237 | 1.83774 | 1.84303 | 0.000034 | 80.470001 | 28.16 | 0.000001 | 0.93 | 0.79 | 0.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.72 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.992 | 0.712 | -25.4 | 189.800003 | 10 | 0.000003 | 18.18 | 1.57469 | 1.15414 | 1.356 | 1.965 | 1.56097 | 1.56798 | 0.000033 | 68.349998 | 68.07 | 0.000003 | 6.7 | 6.47 | 6.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.65 |
Silicon Nitride (Si₃N₄) | Air | 1.358 | 0.71 | 11.5 | 111.199997 | 1 | 0.000003 | 19.02 | 1.79265 | 1.43604 | 1.959 | 2.454 | 1.70015 | 1.70667 | 0.000065 | 73.720001 | 54.290001 | 0.000004 | 8.22 | 7.99 | 7.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.31 | 0.447 | -12.4 | 94.400002 | 10 | 0.000147 | 0.15 | 1.61406 | 1.13208 | 0.777 | 1.559 | 1.48261 | 1.48983 | 0.000068 | 88.860001 | 17.35 | 0.000001 | 7.31 | 6.83 | 6.87 | 1,260 | 1,625 | FDTD | 1.07 |
SU-8 | Silicon Dioxide (SiO₂) | 1.84 | 0.552 | -14.1 | 131.100006 | 1 | 0.00001 | 0.29 | 1.84022 | 1.27209 | 2.446 | 3.169 | 1.48305 | 1.48988 | 0.000047 | 74.779999 | 13.04 | 0.000002 | 5.43 | 4.95 | 5.05 | 1,260 | 1,625 | FDTD | 3.42 |
SU-8 | Air | 1.148 | 0.721 | 7.1 | 175.800003 | 5 | 0.000009 | 0.3 | 1.951 | 1.38786 | 1.488 | 2.589 | 1.43882 | 1.44364 | 0.000029 | 84.150002 | 60.029999 | 0.000004 | 2.99 | 2.52 | 2.64 | 1,260 | 1,625 | FDTD | 0.72 |
Polydimethylsiloxane (PDMS) | Air | 0.997 | 0.432 | 7.9 | 131.199997 | 5 | 0.000244 | 0.16 | 1.8884 | 1.1695 | 1.516 | 2.719 | 1.8013 | 1.80546 | 0.000034 | 54.279999 | 45.560001 | 0.000003 | 5.53 | 5.25 | 5.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.43 |
Polymethyl Methacrylate (PMMA) | Air | 0.876 | 0.751 | -13 | 116.699997 | 1 | 0.000008 | 0.25 | 1.4577 | 1.09476 | 2.941 | 3.676 | 1.44894 | 1.45346 | 0.000035 | 83.25 | 72.589996 | 0.000003 | 7.11 | 6.84 | 6.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.23 |
Polymethyl Methacrylate (PMMA) | Air | 1.586 | 0.991 | -8.7 | 160.300003 | 5 | 0.000009 | 0.24 | 1.58989 | 1.40125 | 1.514 | 2.067 | 1.68261 | 1.68546 | 0.000017 | 82.43 | 38.959999 | 0.000001 | 9.08 | 8.82 | 8.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.39 |
SU-8 | Air | 0.62 | 0.5 | -0.5 | 149 | 1 | 0.000009 | 0.24 | 1.89358 | 1.30842 | 0.843 | 1.52 | 1.83597 | 1.84493 | 0.00006 | 77.309998 | 82.290001 | 0.000001 | 1.68 | 1.32 | 1.48 | 1,260 | 1,625 | FDTD | 3.34 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.146 | 0.21 | 12 | 177.300003 | 1 | 0.000009 | 0.19 | 1.40486 | 1.1966 | 0.553 | 0.872 | 1.48469 | 1.49337 | 0.000053 | 86.260002 | 91.220001 | 0.000005 | 0.69 | 0.31 | 0.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.92 |
Silicon Nitride (Si₃N₄) | Air | 0.645 | 0.538 | 4.6 | 193.600006 | 10 | 0.000003 | 19.4 | 1.72735 | 1.28765 | 0.469 | 1.211 | 1.48547 | 1.48716 | 0.000009 | 76.349998 | 33.16 | 0.000002 | 5.37 | 4.93 | 5.2 | 1,260 | 1,625 | FDTD | 3.57 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.455 | 0.733 | -5.2 | 148.600006 | 10 | 0.000012 | 0.2 | 1.75519 | 1.03811 | 1.956 | 2.842 | 1.80806 | 1.81147 | 0.000022 | 73.269997 | 79.620003 | 0.000001 | 7.56 | 7.3 | 7.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.49 |
SU-8 | Air | 0.571 | 0.279 | -30.4 | 90.599998 | 10 | 0.000008 | 0.24 | 1.74254 | 1.20873 | 2.019 | 3.406 | 1.42537 | 1.42704 | 0.000014 | 66.910004 | 78.459999 | 0.000002 | 6.69 | 6.51 | 6.26 | 1,260 | 1,625 | FDTD | 1.37 |
Polydimethylsiloxane (PDMS) | Air | 0.719 | 0.538 | -33.799999 | 125.900002 | 5 | 0.000248 | 0.16 | 1.50732 | 1.39433 | 0.319 | 1.442 | 1.45675 | 1.46281 | 0.000038 | 57.880001 | 26.129999 | 0.000001 | 1.01 | 0.7 | 0.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.48 |
Silicon Dioxide (SiO₂) | Air | 1.668 | 0.841 | -38.900002 | 145.100006 | 1 | 0.000001 | 1.47 | 1.81342 | 1.25709 | 0.835 | 2.229 | 1.89604 | 1.90467 | 0.000047 | 67.410004 | 66.839996 | 0.000002 | 5.83 | 5.4 | 5.55 | 1,260 | 1,625 | FDTD | 2.66 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.696 | 0.642 | -43.700001 | 84.300003 | 1 | 0.000003 | 18.24 | 1.46876 | 1.47699 | 1.803 | 2.878 | 1.51916 | 1.5233 | 0.000032 | 87.599998 | 35.990002 | 0.000001 | 3.25 | 2.98 | 3.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.17 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.804 | 0.287 | -43.299999 | 177.199997 | 1 | 0.000001 | 1.31 | 1.8536 | 1.18102 | 1.509 | 1.841 | 1.42444 | 1.42598 | 0.000007 | 81.82 | 92.68 | 0.000002 | 5.67 | 5.49 | 5.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.78 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.661 | 0.359 | 15.5 | 130 | 5 | 0.000001 | 1.33 | 1.42972 | 1.38172 | 2.818 | 3.938 | 1.85353 | 1.86043 | 0.00006 | 63.380001 | 41.619999 | 0.000001 | 7.4 | 7.01 | 7.03 | 1,260 | 1,625 | FDTD | 0.7 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.586 | 0.909 | -48.299999 | 187.699997 | 5 | 0.000001 | 1.35 | 1.7934 | 1.4448 | 1.173 | 1.386 | 1.78401 | 1.78564 | 0.000007 | 68.480003 | 92.169998 | 0.000004 | 1.44 | 1.03 | 1.05 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.36 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.966 | 0.34 | -35 | 153.899994 | 1 | 0.000206 | 0.18 | 1.49636 | 1.26076 | 2.877 | 3.371 | 1.6846 | 1.68575 | 0.000006 | 55.279999 | 29.67 | 0.000002 | 1.86 | 1.42 | 1.55 | 1,260 | 1,625 | FDTD | 1.88 |
Silicon Dioxide (SiO₂) | Air | 0.937 | 0.97 | -19.700001 | 155.800003 | 5 | 0.000001 | 1.36 | 1.45916 | 1.08035 | 2.064 | 2.434 | 1.91338 | 1.9152 | 0.00001 | 50.02 | 73.160004 | 0 | 7.57 | 7.25 | 7.41 | 1,260 | 1,625 | FDTD | 4.07 |
Silicon Nitride (Si₃N₄) | Air | 1.233 | 0.73 | 11.2 | 119.800003 | 5 | 0.000003 | 17.15 | 1.70124 | 1.2164 | 2.983 | 3.635 | 1.78886 | 1.79415 | 0.000049 | 83.279999 | 70.550003 | 0.000005 | 9.78 | 9.63 | 9.51 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.32 |
SU-8 | Air | 1.811 | 0.783 | 3.7 | 168.800003 | 5 | 0.000009 | 0.25 | 1.61992 | 1.25533 | 0.373 | 1.237 | 1.95432 | 1.95855 | 0.000026 | 84.120003 | 35.349998 | 0.000004 | 3.51 | 3.28 | 3.34 | 1,260 | 1,625 | FDTD | 4.95 |
Silicon Dioxide (SiO₂) | Air | 0.835 | 0.98 | 2.4 | 157.5 | 5 | 0.000001 | 1.37 | 1.90002 | 1.36056 | 1.692 | 1.828 | 1.89611 | 1.90607 | 0.000064 | 68.589996 | 12.52 | 0.000002 | 8.23 | 7.89 | 7.98 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.47 |
Silicon Nitride (Si₃N₄) | Air | 0.538 | 0.371 | -20.700001 | 86.900002 | 1 | 0.000003 | 15.48 | 1.84182 | 1.488 | 1.168 | 2.171 | 1.82159 | 1.82678 | 0.000048 | 72.480003 | 66.360001 | 0.000004 | 2.05 | 1.63 | 1.93 | 1,260 | 1,625 | FDTD | 4.56 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.904 | 0.714 | 19.9 | 125.300003 | 1 | 0.000009 | 0.23 | 1.74588 | 1.49392 | 1.443 | 2.876 | 1.84757 | 1.85326 | 0.000054 | 76.910004 | 29.049999 | 0.000004 | 2.3 | 1.98 | 2.1 | 1,260 | 1,625 | FDTD | 2.74 |
SU-8 | Silicon Dioxide (SiO₂) | 1.86 | 0.814 | -8.5 | 112.300003 | 5 | 0.000007 | 0.29 | 1.87641 | 1.05037 | 1.17 | 2.295 | 1.47541 | 1.4817 | 0.000052 | 86.959999 | 35.48 | 0.000001 | 2.49 | 2.04 | 2.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.22 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.069 | 0.905 | 15.6 | 128.600006 | 1 | 0.000003 | 15.85 | 1.54682 | 1.30124 | 2.725 | 3.047 | 1.49627 | 1.50103 | 0.000042 | 60.790001 | 60.720001 | 0.000003 | 6.91 | 6.51 | 6.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.49 |
SU-8 | Air | 0.69 | 0.278 | 9.4 | 87.099998 | 10 | 0.000007 | 0.29 | 1.49988 | 1.24294 | 1.952 | 3.261 | 1.65742 | 1.66008 | 0.000034 | 63.630001 | 27.719999 | 0.000002 | 5.5 | 5.16 | 5.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.52 |
Polymethyl Methacrylate (PMMA) | Air | 1.159 | 0.655 | 1.6 | 146.899994 | 1 | 0.000011 | 0.24 | 1.77432 | 1.42382 | 1.04 | 1.591 | 1.86683 | 1.87053 | 0.000025 | 63.389999 | 73.160004 | 0.000002 | 9.89 | 9.59 | 9.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.32 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.208 | 0.901 | -47.099998 | 89.400002 | 10 | 0.000003 | 16.1 | 1.64952 | 1.49106 | 2.777 | 3.003 | 1.78353 | 1.79042 | 0.00005 | 50.880001 | 29.23 | 0.000003 | 1.97 | 1.75 | 1.54 | 1,260 | 1,625 | FDTD | 2.9 |
Silicon Nitride (Si₃N₄) | Air | 1.075 | 0.901 | -46.099998 | 95.800003 | 10 | 0.000004 | 15.51 | 1.99639 | 1.39419 | 1.771 | 2.428 | 1.90039 | 1.90876 | 0.000059 | 81.879997 | 21.540001 | 0.000003 | 6.19 | 5.87 | 5.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.11 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.537 | 0.7 | -47.299999 | 132.399994 | 5 | 0.000003 | 18.68 | 1.57205 | 1.41122 | 1.737 | 2.038 | 1.93497 | 1.93788 | 0.000016 | 78.540001 | 51.849998 | 0.000004 | 6.03 | 5.81 | 5.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.91 |
Silicon Nitride (Si₃N₄) | Air | 1.621 | 0.59 | -23.299999 | 143.199997 | 10 | 0.000003 | 18.629999 | 1.41584 | 1.48862 | 2.704 | 3.39 | 1.85544 | 1.86037 | 0.00003 | 50.540001 | 82.349998 | 0.000002 | 5.73 | 5.56 | 5.39 | 1,260 | 1,625 | FDTD | 4.21 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.922 | 0.333 | -11.8 | 155.399994 | 10 | 0.000003 | 19.379999 | 1.60728 | 1.11496 | 2.98 | 4.192 | 1.58219 | 1.59054 | 0.00005 | 57.84 | 55.889999 | 0.000001 | 5.07 | 4.64 | 4.85 | 1,260 | 1,625 | FDTD | 3.13 |
Silicon Nitride (Si₃N₄) | Air | 1.094 | 0.612 | -11.5 | 144.300003 | 1 | 0.000003 | 18.540001 | 1.59335 | 1.14481 | 2.261 | 3.545 | 1.73362 | 1.74237 | 0.000056 | 80.910004 | 36.279999 | 0.000003 | 5.31 | 4.82 | 4.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.05 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.993 | 0.757 | -29 | 171 | 1 | 0.000001 | 1.42 | 1.83348 | 1.04726 | 1.173 | 2.595 | 1.79684 | 1.80548 | 0.000043 | 78.599998 | 55.580002 | 0.000003 | 3.28 | 3.04 | 3.12 | 1,260 | 1,625 | FDTD | 3.48 |
Polymethyl Methacrylate (PMMA) | Air | 0.996 | 0.387 | -29.6 | 100 | 1 | 0.000011 | 0.23 | 1.47156 | 1.01991 | 0.79 | 2.192 | 1.58541 | 1.59405 | 0.000067 | 74.800003 | 88.949997 | 0.000004 | 3.45 | 3.08 | 3.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.78 |
SU-8 | Air | 1.507 | 0.803 | 6.9 | 157.399994 | 10 | 0.000011 | 0.28 | 1.92602 | 1.47219 | 0.532 | 1.601 | 1.6969 | 1.70052 | 0.000024 | 79.379997 | 28.110001 | 0 | 3.36 | 2.87 | 2.94 | 1,260 | 1,625 | FDTD | 2 |
Silicon Dioxide (SiO₂) | Air | 0.534 | 0.407 | -1.2 | 166 | 5 | 0.000001 | 1.48 | 1.55869 | 1.05435 | 1.219 | 2.341 | 1.82793 | 1.83099 | 0.000018 | 55.610001 | 47.619999 | 0 | 3.77 | 3.46 | 3.29 | 1,260 | 1,625 | FDTD | 1.8 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.423 | 0.713 | -7.2 | 124.099998 | 1 | 0.000007 | 0.24 | 1.9606 | 1.21179 | 1.721 | 2.021 | 1.9112 | 1.91603 | 0.000037 | 51.869999 | 36.389999 | 0.000001 | 2.59 | 2.27 | 2.49 | 1,260 | 1,625 | FDTD | 0.43 |
Polydimethylsiloxane (PDMS) | Air | 0.788 | 0.454 | -48.200001 | 136 | 10 | 0.000135 | 0.18 | 1.66228 | 1.49432 | 2.372 | 2.536 | 1.86561 | 1.87256 | 0.000038 | 72.050003 | 46.540001 | 0.000002 | 0.91 | 0.67 | 0.56 | 1,260 | 1,625 | FDTD | 3.21 |
SU-8 | Air | 1.321 | 0.813 | -29 | 93.699997 | 5 | 0.000008 | 0.23 | 1.88656 | 1.09421 | 2.868 | 3.56 | 1.44666 | 1.45253 | 0.000048 | 88.849998 | 43.349998 | 0.000001 | 7.93 | 7.45 | 7.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.6 |