waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.731 | 0.645 | -49.400002 | 121.800003 | 1 | 0.000003 | 18.639999 | 1.83826 | 1.15654 | 0.965 | 1.77 | 1.41792 | 1.42321 | 0.000031 | 74.120003 | 53.560001 | 0.000005 | 0.98 | 0.87 | 0.63 | 1,260 | 1,625 | FDTD | 0.2 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.96 | 0.391 | -15.6 | 149.800003 | 1 | 0.000008 | 0.24 | 1.46103 | 1.36047 | 0.32 | 1.005 | 1.99753 | 2.00249 | 0.00003 | 89.459999 | 39.790001 | 0.000005 | 9.7 | 9.27 | 9.24 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.43 |
Polymethyl Methacrylate (PMMA) | Air | 1.438 | 0.385 | -30.200001 | 132.399994 | 1 | 0.000007 | 0.19 | 1.55352 | 1.26398 | 0.821 | 1.258 | 1.78709 | 1.79447 | 0.000045 | 67.93 | 79.589996 | 0 | 4.76 | 4.42 | 4.31 | 1,260 | 1,625 | FDTD | 3.93 |
Polydimethylsiloxane (PDMS) | Air | 1.62 | 0.759 | -0.7 | 98.300003 | 1 | 0.000106 | 0.15 | 1.88649 | 1.16189 | 2.338 | 3.075 | 1.40728 | 1.41242 | 0.000052 | 54.16 | 24.459999 | 0.000004 | 5.61 | 5.5 | 5.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.7 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.662 | 0.324 | -33.299999 | 93.300003 | 1 | 0.000149 | 0.2 | 1.7428 | 1.45196 | 1.024 | 1.472 | 1.56587 | 1.57129 | 0.000043 | 58.060001 | 18.18 | 0.000004 | 2.37 | 1.92 | 2.12 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.63 |
Polymethyl Methacrylate (PMMA) | Air | 1.334 | 0.413 | -29.6 | 155.399994 | 1 | 0.000012 | 0.23 | 1.76662 | 1.34182 | 1.42 | 1.605 | 1.57548 | 1.5826 | 0.000038 | 72.57 | 67.900002 | 0.000003 | 9.28 | 9.01 | 9.02 | 1,260 | 1,625 | FDTD | 3.12 |
Silicon Dioxide (SiO₂) | Air | 1.294 | 0.713 | -30.700001 | 128 | 1 | 0.000001 | 1.4 | 1.85593 | 1.12026 | 2.794 | 4.052 | 1.66578 | 1.67277 | 0.000044 | 63.75 | 62.360001 | 0.000003 | 9.84 | 9.65 | 9.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.85 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.717 | 0.632 | 9.7 | 142.300003 | 5 | 0.000001 | 1.4 | 1.41294 | 1.18725 | 1.309 | 1.691 | 1.92648 | 1.93329 | 0.000051 | 66.919998 | 68.07 | 0.000001 | 3.7 | 3.28 | 3.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.24 |
SU-8 | Silicon Dioxide (SiO₂) | 1.48 | 0.334 | -47.799999 | 119.599998 | 5 | 0.000007 | 0.25 | 1.87544 | 1.26143 | 0.655 | 1.271 | 1.95957 | 1.96907 | 0.000057 | 79.650002 | 41.290001 | 0.000002 | 4.9 | 4.66 | 4.69 | 1,260 | 1,625 | FDTD | 3.57 |
Polymethyl Methacrylate (PMMA) | Air | 0.916 | 0.732 | -46.200001 | 180.600006 | 1 | 0.000012 | 0.21 | 1.87776 | 1.06633 | 2.73 | 3.957 | 1.91962 | 1.92872 | 0.00004 | 72.779999 | 86.870003 | 0.000004 | 7.97 | 7.73 | 7.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.44 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.504 | 0.502 | 17.200001 | 145.899994 | 10 | 0.000003 | 18.23 | 1.59239 | 1.40386 | 1.356 | 1.879 | 1.55316 | 1.5576 | 0.000035 | 61.32 | 38.02 | 0.000001 | 6.66 | 6.29 | 6.19 | 1,260 | 1,625 | FDTD | 0.85 |
Silicon Nitride (Si₃N₄) | Air | 1.64 | 0.958 | 2.5 | 88.699997 | 1 | 0.000003 | 19.27 | 1.46827 | 1.26089 | 0.663 | 2.108 | 1.74748 | 1.756 | 0.000099 | 87 | 35.09 | 0.000005 | 6.41 | 6.03 | 6.13 | 1,260 | 1,625 | FDTD | 1.39 |
Polydimethylsiloxane (PDMS) | Air | 1.683 | 0.96 | -36.799999 | 175 | 10 | 0.00015 | 0.15 | 1.81058 | 1.17257 | 1.528 | 2.56 | 1.74228 | 1.74579 | 0.000017 | 73.93 | 13.8 | 0.000002 | 4.01 | 3.84 | 3.84 | 1,260 | 1,625 | FDTD | 1.25 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.419 | 0.755 | -18.6 | 158.899994 | 10 | 0.000014 | 0.2 | 1.84808 | 1.00974 | 0.666 | 1.367 | 1.46775 | 1.47692 | 0.000052 | 85.510002 | 61.369999 | 0.000004 | 5.15 | 4.68 | 4.68 | 1,260 | 1,625 | FDTD | 1.62 |
SU-8 | Silicon Dioxide (SiO₂) | 0.688 | 0.898 | 7 | 91.599998 | 5 | 0.000007 | 0.24 | 1.65653 | 1.37164 | 2.142 | 2.865 | 1.93876 | 1.942 | 0.000038 | 89.540001 | 26.15 | 0.000004 | 0.65 | 0.45 | 0.26 | 1,260 | 1,625 | FDTD | 3.34 |
Polymethyl Methacrylate (PMMA) | Air | 1.969 | 0.896 | -15.4 | 92 | 10 | 0.000008 | 0.21 | 1.59002 | 1.13956 | 2.601 | 4.003 | 1.85549 | 1.85979 | 0.00004 | 67.040001 | 37.869999 | 0.000003 | 3.78 | 3.4 | 3.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.08 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.224 | 0.618 | 10.8 | 149.600006 | 1 | 0.000178 | 0.18 | 1.4299 | 1.12837 | 2.496 | 2.77 | 1.66083 | 1.66463 | 0.000027 | 61.200001 | 87.459999 | 0.000001 | 2.14 | 1.73 | 1.92 | 1,260 | 1,625 | FDTD | 3.74 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.279 | 0.631 | -35.099998 | 102.099998 | 5 | 0.000008 | 0.21 | 1.98432 | 1.33631 | 2.571 | 2.826 | 1.45465 | 1.4573 | 0.000019 | 69.360001 | 97.610001 | 0 | 8.29 | 7.83 | 7.81 | 1,260 | 1,625 | FDTD | 0.31 |
Silicon Dioxide (SiO₂) | Air | 0.689 | 0.507 | -9.1 | 190.300003 | 1 | 0.000001 | 1.43 | 1.58245 | 1.45602 | 0.552 | 1.597 | 1.61471 | 1.62471 | 0.00005 | 66.440002 | 24.450001 | 0.000003 | 5.07 | 4.9 | 4.86 | 1,260 | 1,625 | FDTD | 2.15 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.514 | 0.561 | -1.7 | 87.699997 | 1 | 0.000008 | 0.2 | 1.85477 | 1.19158 | 0.454 | 0.989 | 1.40566 | 1.41011 | 0.00005 | 54.119999 | 33.389999 | 0.000004 | 4.67 | 4.47 | 4.45 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.35 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.075 | 0.844 | -35.400002 | 166.600006 | 1 | 0.000001 | 1.42 | 1.40795 | 1.48579 | 0.874 | 1.656 | 1.66432 | 1.66789 | 0.000018 | 72.370003 | 29.370001 | 0.000005 | 8.77 | 8.5 | 8.66 | 1,260 | 1,625 | FDTD | 2.82 |
Polydimethylsiloxane (PDMS) | Air | 1.724 | 0.895 | 2.9 | 118.699997 | 1 | 0.00023 | 0.19 | 1.96185 | 1.02845 | 1.916 | 3.169 | 1.92674 | 1.93295 | 0.000054 | 85.900002 | 14.3 | 0.000002 | 6.71 | 6.37 | 6.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.19 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.917 | 0.413 | -20.9 | 109.699997 | 5 | 0.000003 | 16.35 | 1.57108 | 1.10018 | 0.517 | 1.045 | 1.47241 | 1.47941 | 0.000054 | 53.779999 | 75.720001 | 0.000004 | 7.33 | 6.91 | 6.84 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.74 |
Silicon Nitride (Si₃N₄) | Air | 0.815 | 0.721 | 6.5 | 161.899994 | 5 | 0.000003 | 15.62 | 1.57326 | 1.35759 | 1.132 | 2.557 | 1.95041 | 1.95846 | 0.000052 | 52.09 | 53.639999 | 0.000004 | 1.52 | 1.24 | 1.24 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.26 |
SU-8 | Silicon Dioxide (SiO₂) | 0.645 | 0.228 | -44.099998 | 89.699997 | 5 | 0.00001 | 0.23 | 1.49741 | 1.18298 | 0.387 | 1.595 | 1.4861 | 1.49488 | 0.000066 | 81.43 | 48.919998 | 0.000004 | 5.83 | 5.62 | 5.33 | 1,260 | 1,625 | FDTD | 3.21 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.678 | 0.853 | -16.6 | 180.899994 | 5 | 0.000001 | 1.32 | 1.5095 | 1.42916 | 2.16 | 2.856 | 1.64519 | 1.65226 | 0.000036 | 72.75 | 44.049999 | 0.000003 | 7.81 | 7.43 | 7.7 | 1,260 | 1,625 | FDTD | 4.12 |
Polymethyl Methacrylate (PMMA) | Air | 0.878 | 0.823 | -19.200001 | 115.599998 | 5 | 0.000011 | 0.22 | 1.41223 | 1.2498 | 0.561 | 1.005 | 1.85959 | 1.86781 | 0.000061 | 70.849998 | 16.91 | 0 | 5.76 | 5.61 | 5.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.55 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.147 | 0.316 | -18.200001 | 134.300003 | 10 | 0.000233 | 0.18 | 1.52502 | 1.3411 | 2.014 | 2.328 | 1.6132 | 1.61427 | 0.000007 | 59.889999 | 97.639999 | 0.000001 | 7.64 | 7.43 | 7.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.37 |
SU-8 | Silicon Dioxide (SiO₂) | 1.029 | 0.975 | 12.7 | 171.199997 | 1 | 0.000011 | 0.22 | 1.75209 | 1.46322 | 2.904 | 3.248 | 1.58779 | 1.59099 | 0.00002 | 71.019997 | 33 | 0.000004 | 4.58 | 4.16 | 4.15 | 1,260 | 1,625 | FDTD | 0.48 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.024 | 0.496 | 3 | 153.399994 | 10 | 0.000196 | 0.16 | 1.93539 | 1.23726 | 1.027 | 1.88 | 1.55799 | 1.56034 | 0.000016 | 75.209999 | 52.02 | 0.000002 | 4.16 | 3.83 | 3.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.87 |
Silicon Dioxide (SiO₂) | Air | 1.174 | 0.929 | 6.1 | 101.800003 | 1 | 0.000001 | 1.43 | 1.61609 | 1.42949 | 2.313 | 2.769 | 1.79099 | 1.7983 | 0.000076 | 86.169998 | 61.630001 | 0.000004 | 4.79 | 4.45 | 4.51 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.61 |
Silicon Nitride (Si₃N₄) | Air | 0.515 | 0.403 | -42.700001 | 89.400002 | 5 | 0.000003 | 19.719999 | 1.73082 | 1.14133 | 0.342 | 1.618 | 1.87114 | 1.87943 | 0.000063 | 89.150002 | 78.75 | 0.000004 | 4.34 | 4.1 | 3.93 | 1,260 | 1,625 | FDTD | 0.3 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.727 | 0.399 | -35.5 | 94 | 10 | 0.000003 | 15.9 | 1.61159 | 1.21157 | 0.32 | 1.653 | 1.80795 | 1.81207 | 0.000032 | 73.589996 | 49.549999 | 0.000003 | 6.94 | 6.52 | 6.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.82 |
Silicon Dioxide (SiO₂) | Air | 1.614 | 0.476 | -7.7 | 149.300003 | 1 | 0.000001 | 1.32 | 1.77778 | 1.22241 | 1.173 | 1.461 | 1.79607 | 1.80593 | 0.000063 | 70.75 | 91.059998 | 0.000002 | 7.6 | 7.49 | 7.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.72 |
SU-8 | Silicon Dioxide (SiO₂) | 0.892 | 0.349 | 18.4 | 138.5 | 10 | 0.00001 | 0.28 | 1.51097 | 1.07618 | 1.723 | 2.598 | 1.94034 | 1.94518 | 0.00004 | 72.910004 | 24.6 | 0 | 3.46 | 3.34 | 3.06 | 1,260 | 1,625 | FDTD | 1.75 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.161 | 0.305 | -29.6 | 186.800003 | 10 | 0.00001 | 0.21 | 1.88768 | 1.09633 | 0.884 | 1.021 | 1.57325 | 1.58319 | 0.000046 | 58.950001 | 17.700001 | 0.000002 | 7.56 | 7.31 | 7.42 | 1,260 | 1,625 | FDTD | 3.45 |
Silicon Nitride (Si₃N₄) | Air | 1.683 | 0.88 | -31.4 | 158.800003 | 1 | 0.000003 | 15.01 | 1.58181 | 1.02896 | 0.219 | 0.968 | 1.5581 | 1.56201 | 0.000021 | 79.400002 | 96.529999 | 0.000002 | 2.54 | 2.16 | 2.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.36 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.874 | 0.25 | -21.299999 | 157.100006 | 10 | 0.000001 | 1.32 | 1.54869 | 1.27423 | 1.189 | 1.852 | 1.40927 | 1.41598 | 0.000038 | 57.68 | 67.790001 | 0.000001 | 8.76 | 8.42 | 8.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.67 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.526 | 0.496 | 15.3 | 99.199997 | 1 | 0.000001 | 1.49 | 1.62652 | 1.40226 | 2.805 | 3.025 | 1.71796 | 1.72777 | 0.000117 | 88.610001 | 30.01 | 0.000001 | 9.14 | 8.89 | 8.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.94 |
SU-8 | Silicon Dioxide (SiO₂) | 1.064 | 0.434 | -32.400002 | 129.100006 | 1 | 0.00001 | 0.23 | 1.69092 | 1.42365 | 0.914 | 1.325 | 1.96265 | 1.97213 | 0.000059 | 77.919998 | 98.360001 | 0.000003 | 9.33 | 8.93 | 9.18 | 1,260 | 1,625 | FDTD | 2.41 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.645 | 0.807 | -29.299999 | 135 | 10 | 0.00001 | 0.22 | 1.87104 | 1.4139 | 2.529 | 3.94 | 1.63527 | 1.63683 | 0.000009 | 73.669998 | 83.029999 | 0.000005 | 6.34 | 6.23 | 5.98 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.67 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.093 | 0.887 | -23.200001 | 141.300003 | 1 | 0.000003 | 19.870001 | 1.87814 | 1.43371 | 2.554 | 3.089 | 1.46234 | 1.46788 | 0.000034 | 76.199997 | 69.400002 | 0.000005 | 1.01 | 0.54 | 0.76 | 1,260 | 1,625 | FDTD | 2.93 |
SU-8 | Silicon Dioxide (SiO₂) | 0.546 | 0.473 | 14 | 122.400002 | 1 | 0.000009 | 0.27 | 1.48321 | 1.41878 | 0.703 | 1.482 | 1.84732 | 1.85591 | 0.000079 | 71.260002 | 90.860001 | 0.000003 | 4.61 | 4.22 | 4.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.04 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.742 | 0.802 | 11 | 103.199997 | 5 | 0.000003 | 15.2 | 1.77634 | 1.38395 | 1.513 | 2.227 | 1.576 | 1.57792 | 0.000021 | 73.769997 | 18.27 | 0.000001 | 4.35 | 4.17 | 4.13 | 1,260 | 1,625 | FDTD | 3.66 |
Polymethyl Methacrylate (PMMA) | Air | 0.806 | 0.876 | -15.9 | 88.300003 | 1 | 0.000014 | 0.21 | 1.432 | 1.42558 | 2.35 | 3.577 | 1.80689 | 1.81243 | 0.000053 | 64.769997 | 49.860001 | 0.000004 | 1.7 | 1.5 | 1.43 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.78 |
Silicon Nitride (Si₃N₄) | Air | 1.258 | 0.496 | -23.1 | 187 | 1 | 0.000003 | 18.799999 | 1.66401 | 1.05305 | 0.731 | 1.178 | 1.52871 | 1.53748 | 0.000042 | 88.870003 | 20.940001 | 0.000001 | 6.4 | 5.92 | 6.09 | 1,260 | 1,625 | FDTD | 2.55 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.867 | 0.359 | 16.200001 | 135.100006 | 1 | 0.000149 | 0.15 | 1.77273 | 1.29941 | 2.317 | 3.064 | 1.61 | 1.61128 | 0.000011 | 61.630001 | 69.720001 | 0.000001 | 2.94 | 2.7 | 2.67 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.16 |
SU-8 | Silicon Dioxide (SiO₂) | 1.607 | 0.828 | -26.1 | 199 | 10 | 0.000007 | 0.21 | 1.56964 | 1.44091 | 1.88 | 1.994 | 1.78365 | 1.78988 | 0.000028 | 67.980003 | 60.110001 | 0.000005 | 5.07 | 4.6 | 4.68 | 1,260 | 1,625 | FDTD | 2.04 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.921 | 0.396 | -25.9 | 187.399994 | 10 | 0.000001 | 1.42 | 1.77498 | 1.33932 | 1.642 | 2.539 | 1.82058 | 1.8219 | 0.000006 | 56.43 | 86.559998 | 0.000002 | 5.78 | 5.42 | 5.36 | 1,260 | 1,625 | FDTD | 2.01 |
SU-8 | Silicon Dioxide (SiO₂) | 1.398 | 0.49 | -2.9 | 130.199997 | 5 | 0.000011 | 0.28 | 1.8031 | 1.26187 | 2.916 | 3.931 | 1.61471 | 1.61953 | 0.000036 | 73.550003 | 93.480003 | 0.000001 | 9.01 | 8.75 | 8.64 | 1,260 | 1,625 | FDTD | 4.13 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.827 | 0.704 | -3 | 154.199997 | 10 | 0.000246 | 0.18 | 1.94717 | 1.40241 | 0.78 | 2.135 | 1.54336 | 1.55065 | 0.000046 | 72.790001 | 44.27 | 0.000002 | 6.14 | 5.97 | 5.73 | 1,260 | 1,625 | FDTD | 4.55 |
Silicon Dioxide (SiO₂) | Air | 1.54 | 0.878 | -30.200001 | 185.399994 | 10 | 0.000001 | 1.34 | 1.72648 | 1.47248 | 2.563 | 2.751 | 1.93963 | 1.94096 | 0.000006 | 84.589996 | 51.23 | 0.000004 | 3.17 | 2.97 | 2.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.87 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.696 | 0.926 | -49.599998 | 131.199997 | 5 | 0.000125 | 0.15 | 1.89641 | 1.09815 | 1.011 | 2.342 | 1.65755 | 1.66502 | 0.000041 | 57.119999 | 67.129997 | 0.000001 | 8.55 | 8.29 | 8.35 | 1,260 | 1,625 | FDTD | 3.64 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.449 | 0.777 | -40.799999 | 148.899994 | 1 | 0.000003 | 18.469999 | 1.8822 | 1.37162 | 0.705 | 1.449 | 1.61631 | 1.62366 | 0.000039 | 68.959999 | 76.559998 | 0.000003 | 4.83 | 4.58 | 4.48 | 1,260 | 1,625 | FDTD | 4.66 |
SU-8 | Air | 0.943 | 0.828 | -16.299999 | 105 | 10 | 0.000009 | 0.29 | 1.62053 | 1.42163 | 2.765 | 3.264 | 1.54651 | 1.55543 | 0.000074 | 87.330002 | 91.43 | 0.000001 | 8.98 | 8.78 | 8.8 | 1,260 | 1,625 | FDTD | 4.13 |
Silicon Nitride (Si₃N₄) | Air | 1.535 | 0.737 | -43.400002 | 110.300003 | 1 | 0.000003 | 15.03 | 1.42052 | 1.19226 | 0.617 | 0.966 | 1.52905 | 1.53512 | 0.000039 | 50.439999 | 50.73 | 0.000002 | 2.9 | 2.54 | 2.7 | 1,260 | 1,625 | FDTD | 0.49 |
SU-8 | Air | 0.814 | 0.674 | -38.200001 | 136.5 | 1 | 0.000007 | 0.23 | 1.75352 | 1.00479 | 2.621 | 3.601 | 1.54909 | 1.55042 | 0.000008 | 62.619999 | 97.230003 | 0.000003 | 9.67 | 9.29 | 9.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.54 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.683 | 0.444 | -48.700001 | 144.699997 | 5 | 0.000001 | 1.42 | 1.69675 | 1.38407 | 1.869 | 2.953 | 1.47161 | 1.47735 | 0.00003 | 69.739998 | 95.32 | 0.000004 | 6.36 | 6.01 | 6.25 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.67 |
Silicon Nitride (Si₃N₄) | Air | 0.679 | 0.941 | 19.299999 | 195.899994 | 10 | 0.000003 | 15.99 | 1.90612 | 1.47055 | 1.598 | 2.547 | 1.61022 | 1.61306 | 0.000016 | 56.27 | 86.220001 | 0.000003 | 8.05 | 7.75 | 7.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.81 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.308 | 0.495 | -47.200001 | 154.100006 | 1 | 0.000003 | 16.389999 | 1.63561 | 1.25921 | 0.773 | 2.261 | 1.69826 | 1.70273 | 0.000022 | 69.099998 | 25.84 | 0.000002 | 5.15 | 4.83 | 5.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.29 |
Silicon Dioxide (SiO₂) | Air | 1.514 | 0.323 | -16.200001 | 175.100006 | 5 | 0.000001 | 1.42 | 1.47606 | 1.22592 | 0.229 | 0.659 | 1.74988 | 1.75611 | 0.000033 | 59.220001 | 77.879997 | 0.000001 | 1.25 | 1.1 | 1.13 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.77 |
Silicon Dioxide (SiO₂) | Air | 0.672 | 0.459 | 8.9 | 86.199997 | 5 | 0.000001 | 1.34 | 1.83111 | 1.01425 | 2.196 | 2.381 | 1.67194 | 1.67425 | 0.00003 | 63.689999 | 30.48 | 0.000001 | 8.62 | 8.5 | 8.14 | 1,260 | 1,625 | FDTD | 4.76 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.05 | 0.963 | -25.9 | 121.300003 | 5 | 0.000001 | 1.46 | 1.67508 | 1.1865 | 0.417 | 1.561 | 1.873 | 1.87924 | 0.000042 | 68.849998 | 80.730003 | 0.000002 | 4.26 | 4.16 | 3.96 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.11 |
Silicon Nitride (Si₃N₄) | Air | 1.622 | 0.228 | -34.099998 | 191.199997 | 1 | 0.000003 | 15.85 | 1.81637 | 1.17468 | 1.569 | 2.17 | 1.76847 | 1.77433 | 0.000026 | 80.519997 | 76.209999 | 0.000002 | 3.17 | 3.04 | 2.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.74 |
Silicon Dioxide (SiO₂) | Air | 0.685 | 0.405 | -13.3 | 184.100006 | 5 | 0.000001 | 1.36 | 1.63438 | 1.25434 | 2.422 | 2.777 | 1.91045 | 1.91804 | 0.000038 | 53.68 | 37.599998 | 0.000002 | 0.54 | 0.04 | 0.1 | 1,260 | 1,625 | FDTD | 1.92 |
Polydimethylsiloxane (PDMS) | Air | 1.914 | 0.363 | -9.9 | 162.600006 | 1 | 0.000262 | 0.2 | 1.94145 | 1.36948 | 0.436 | 1.665 | 1.66428 | 1.67073 | 0.000037 | 59.639999 | 20.59 | 0.000002 | 6.19 | 5.93 | 5.83 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.42 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.831 | 0.723 | 8.8 | 101.099998 | 1 | 0.000148 | 0.15 | 1.441 | 1.30912 | 1.6 | 2.15 | 1.80329 | 1.81006 | 0.000073 | 82.980003 | 69.620003 | 0.000002 | 3.48 | 3.06 | 3.25 | 1,260 | 1,625 | FDTD | 1.76 |
Polymethyl Methacrylate (PMMA) | Air | 1.504 | 0.668 | 14.2 | 159.300003 | 5 | 0.00001 | 0.22 | 1.48027 | 1.03592 | 1.148 | 1.569 | 1.45836 | 1.46475 | 0.000044 | 67.050003 | 89.18 | 0.000001 | 2.72 | 2.49 | 2.35 | 1,260 | 1,625 | FDTD | 1.36 |
Polydimethylsiloxane (PDMS) | Air | 0.751 | 0.844 | -49.799999 | 169.5 | 5 | 0.000125 | 0.17 | 1.67406 | 1.25639 | 0.76 | 1.304 | 1.98036 | 1.98935 | 0.000041 | 64.400002 | 29.709999 | 0.000002 | 3.39 | 2.95 | 3.01 | 1,260 | 1,625 | FDTD | 0.45 |
SU-8 | Silicon Dioxide (SiO₂) | 1.587 | 0.986 | -43.299999 | 163 | 10 | 0.000009 | 0.26 | 1.94763 | 1.37854 | 1.127 | 1.533 | 1.9098 | 1.91534 | 0.000027 | 65.690002 | 33.650002 | 0 | 1.15 | 0.93 | 0.9 | 1,260 | 1,625 | FDTD | 4.79 |
SU-8 | Air | 1.853 | 0.799 | 10.3 | 183.800003 | 10 | 0.00001 | 0.24 | 1.90609 | 1.42209 | 0.184 | 0.8 | 1.75855 | 1.76322 | 0.000027 | 70.75 | 52.619999 | 0.000003 | 8.82 | 8.6 | 8.51 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.27 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.366 | 0.928 | -49.799999 | 94.699997 | 1 | 0.000011 | 0.21 | 1.8497 | 1.4146 | 1.466 | 2.138 | 1.57988 | 1.58759 | 0.000053 | 86.370003 | 11.47 | 0.000005 | 4.17 | 3.84 | 4 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.12 |
Silicon Nitride (Si₃N₄) | Air | 0.756 | 0.715 | -23.1 | 122.599998 | 10 | 0.000003 | 15.17 | 1.87852 | 1.0253 | 1.628 | 2.906 | 1.42372 | 1.42892 | 0.000036 | 79.540001 | 40.07 | 0.000004 | 9.88 | 9.54 | 9.47 | 1,260 | 1,625 | FDTD | 0.21 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.511 | 0.209 | 1.5 | 99.699997 | 5 | 0.000012 | 0.24 | 1.67768 | 1.40538 | 2.493 | 3.424 | 1.51351 | 1.52214 | 0.000088 | 73.889999 | 70.110001 | 0.000004 | 0.61 | 0.39 | 0.22 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.21 |
Silicon Nitride (Si₃N₄) | Air | 1.007 | 0.903 | -43.5 | 191 | 5 | 0.000003 | 15.29 | 1.90566 | 1.04557 | 2.998 | 3.293 | 1.84463 | 1.84821 | 0.000015 | 81.809998 | 48.650002 | 0.000001 | 7.96 | 7.53 | 7.8 | 1,260 | 1,625 | FDTD | 2.82 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.624 | 0.417 | -29.6 | 134.199997 | 10 | 0.000012 | 0.22 | 1.69924 | 1.49683 | 0.288 | 0.836 | 1.53134 | 1.53385 | 0.000015 | 89.160004 | 16.030001 | 0.000005 | 4.09 | 3.63 | 3.73 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.24 |
Polymethyl Methacrylate (PMMA) | Air | 1.736 | 0.429 | -20.5 | 195.100006 | 5 | 0.000012 | 0.19 | 1.47777 | 1.44704 | 0.411 | 1.768 | 1.47783 | 1.48728 | 0.000044 | 56.290001 | 98.519997 | 0 | 0.58 | 0.23 | 0.2 | 1,260 | 1,625 | FDTD | 2.38 |
SU-8 | Silicon Dioxide (SiO₂) | 1.559 | 0.769 | -16.299999 | 174.699997 | 1 | 0.00001 | 0.24 | 1.40204 | 1.03174 | 0.397 | 1.366 | 1.56449 | 1.56576 | 0.000007 | 58.279999 | 77.360001 | 0.000002 | 5.34 | 5.23 | 4.94 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.27 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.313 | 0.441 | -46.700001 | 179.100006 | 10 | 0.000015 | 0.23 | 1.47693 | 1.05026 | 2.002 | 2.609 | 1.96347 | 1.9686 | 0.000023 | 87.220001 | 93.209999 | 0.000002 | 6.35 | 6.15 | 5.9 | 1,260 | 1,625 | FDTD | 3.84 |
Silicon Nitride (Si₃N₄) | Air | 1.358 | 0.704 | -5.9 | 160.199997 | 1 | 0.000003 | 15.58 | 1.44375 | 1.12968 | 0.696 | 2.045 | 1.93774 | 1.94163 | 0.000023 | 82.809998 | 26.030001 | 0.000004 | 4.86 | 4.66 | 4.49 | 1,260 | 1,625 | FDTD | 1.38 |
SU-8 | Silicon Dioxide (SiO₂) | 1.526 | 0.425 | -8.6 | 165.199997 | 10 | 0.00001 | 0.29 | 1.69646 | 1.15232 | 2.887 | 3.331 | 1.49269 | 1.50153 | 0.000051 | 88.25 | 51.110001 | 0 | 5.95 | 5.65 | 5.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.3 |
Polymethyl Methacrylate (PMMA) | Air | 0.704 | 0.544 | -12.6 | 130.100006 | 1 | 0.000012 | 0.21 | 1.92968 | 1.22093 | 0.394 | 0.807 | 1.97686 | 1.98572 | 0.000062 | 53.720001 | 47.77 | 0.000002 | 8.7 | 8.21 | 8.5 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.18 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.275 | 0.312 | -15.2 | 114.5 | 1 | 0.000003 | 15.34 | 1.76643 | 1.08817 | 1.278 | 1.963 | 1.63351 | 1.64049 | 0.000054 | 51.360001 | 79.940002 | 0.000003 | 1.59 | 1.21 | 1.3 | 1,260 | 1,625 | FDTD | 2.08 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.821 | 0.52 | -36.700001 | 81.300003 | 10 | 0.000003 | 17.48 | 1.43375 | 1.27454 | 2.484 | 3.471 | 1.70088 | 1.70422 | 0.000028 | 88.379997 | 21.940001 | 0.000001 | 9.97 | 9.63 | 9.73 | 1,260 | 1,625 | FDTD | 2.54 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.992 | 0.512 | -27.5 | 148.699997 | 1 | 0.000001 | 1.46 | 1.6813 | 1.17816 | 1.332 | 2.367 | 1.9968 | 1.99823 | 0.000008 | 63.459999 | 72.550003 | 0.000005 | 1.19 | 0.99 | 0.71 | 1,260 | 1,625 | FDTD | 0.96 |
SU-8 | Air | 0.646 | 0.334 | -24 | 92 | 1 | 0.000008 | 0.26 | 1.50585 | 1.35365 | 0.399 | 1.405 | 1.91761 | 1.92684 | 0.00008 | 66.209999 | 21.360001 | 0.000002 | 5.54 | 5.32 | 5.05 | 1,260 | 1,625 | FDTD | 2.12 |
SU-8 | Silicon Dioxide (SiO₂) | 1.188 | 0.985 | -42.299999 | 131.699997 | 1 | 0.000006 | 0.2 | 1.60275 | 1.07804 | 0.507 | 1.358 | 1.84637 | 1.85197 | 0.000032 | 79 | 22.809999 | 0.000001 | 2.09 | 1.91 | 1.93 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.74 |
Silicon Dioxide (SiO₂) | Air | 1.133 | 0.261 | 18.299999 | 91.800003 | 5 | 0.000001 | 1.49 | 1.5843 | 1.37585 | 2.02 | 2.999 | 1.84829 | 1.85518 | 0.000094 | 82.18 | 80.050003 | 0.000001 | 4.53 | 4.13 | 4.07 | 1,260 | 1,625 | FDTD | 0.15 |
Polydimethylsiloxane (PDMS) | Air | 1.772 | 0.559 | -10.8 | 174.5 | 5 | 0.000153 | 0.2 | 1.5313 | 1.49926 | 1.113 | 2.523 | 1.55844 | 1.56434 | 0.000032 | 56.5 | 81.099998 | 0.000003 | 9.96 | 9.58 | 9.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.2 |
Polymethyl Methacrylate (PMMA) | Air | 1.472 | 0.306 | 9 | 91.699997 | 10 | 0.000011 | 0.21 | 1.71795 | 1.3598 | 1.597 | 1.825 | 1.88878 | 1.89687 | 0.000098 | 66.650002 | 43.389999 | 0 | 4.01 | 3.52 | 3.78 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.78 |
SU-8 | Silicon Dioxide (SiO₂) | 1.943 | 0.285 | 11 | 148.699997 | 10 | 0.00001 | 0.24 | 1.79741 | 1.28515 | 0.326 | 1.185 | 1.90781 | 1.91671 | 0.000065 | 80.730003 | 56.98 | 0.000003 | 3.81 | 3.33 | 3.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.67 |
Polydimethylsiloxane (PDMS) | Air | 1.113 | 0.735 | -6.8 | 197.5 | 10 | 0.000284 | 0.16 | 1.78121 | 1.49516 | 2.741 | 3.691 | 1.70227 | 1.70464 | 0.000012 | 70.830002 | 53.119999 | 0.000004 | 4.97 | 4.57 | 4.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.2 |
SU-8 | Silicon Dioxide (SiO₂) | 1.127 | 0.997 | -22.700001 | 83.5 | 5 | 0.00001 | 0.27 | 1.45334 | 1.46683 | 0.195 | 1.512 | 1.46499 | 1.46932 | 0.000041 | 50.830002 | 54.040001 | 0.000001 | 5.49 | 5.13 | 5.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.76 |
Silicon Nitride (Si₃N₄) | Air | 1.333 | 0.436 | 19.299999 | 112.599998 | 5 | 0.000003 | 19.629999 | 1.6136 | 1.32738 | 0.867 | 1.57 | 1.97925 | 1.98427 | 0.000054 | 77.669998 | 24.889999 | 0.000004 | 8.85 | 8.58 | 8.46 | 1,260 | 1,625 | FDTD | 1.41 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.742 | 0.69 | -25.799999 | 106.599998 | 1 | 0.000003 | 15.61 | 1.47293 | 1.47987 | 2.642 | 3.345 | 1.65959 | 1.66442 | 0.000036 | 68.230003 | 87.580002 | 0.000003 | 9.19 | 9.07 | 8.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.65 |
SU-8 | Air | 1.015 | 0.708 | -7.1 | 160.300003 | 10 | 0.000007 | 0.24 | 1.89381 | 1.00494 | 0.877 | 1 | 1.67134 | 1.68093 | 0.000057 | 52.330002 | 48.240002 | 0.000002 | 4.46 | 4.26 | 4.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.61 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.461 | 0.991 | 1.4 | 123.400002 | 5 | 0.000221 | 0.16 | 1.76715 | 1.24839 | 0.432 | 1.72 | 1.6808 | 1.68914 | 0.000068 | 55.470001 | 28.08 | 0.000002 | 8.01 | 7.56 | 7.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.21 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.666 | 0.225 | 9.7 | 134.300003 | 10 | 0.000003 | 17.049999 | 1.81933 | 1.0013 | 1.353 | 2.618 | 1.88497 | 1.89405 | 0.000073 | 69.879997 | 77.75 | 0 | 6.15 | 6.02 | 5.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.63 |
SU-8 | Silicon Dioxide (SiO₂) | 0.933 | 0.44 | -33.799999 | 137.300003 | 10 | 0.000011 | 0.25 | 1.9067 | 1.41279 | 2.672 | 2.859 | 1.7352 | 1.73734 | 0.000013 | 66.809998 | 72.779999 | 0.000001 | 6.87 | 6.4 | 6.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.81 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.106 | 0.974 | -37.700001 | 119.800003 | 5 | 0.000001 | 1.44 | 1.87864 | 1.18524 | 2.214 | 3.403 | 1.45522 | 1.45771 | 0.000016 | 81.650002 | 16.23 | 0 | 9 | 8.7 | 8.62 | 1,260 | 1,625 | FDTD | 4.12 |
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