waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SU-8 | Air | 0.985 | 0.332 | -27.4 | 165 | 5 | 0.000006 | 0.26 | 1.46863 | 1.03806 | 0.284 | 1.158 | 1.63082 | 1.64019 | 0.000049 | 59.720001 | 49.650002 | 0.000001 | 6.76 | 6.54 | 6.28 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.89 |
Polydimethylsiloxane (PDMS) | Air | 1.726 | 0.628 | -0.7 | 137.5 | 5 | 0.000155 | 0.2 | 1.42458 | 1.4375 | 0.233 | 1.307 | 1.4651 | 1.47381 | 0.000063 | 79.209999 | 39.599998 | 0.000004 | 6.07 | 5.58 | 5.79 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.84 |
Silicon Nitride (Si₃N₄) | Air | 1.79 | 0.944 | 7.8 | 186 | 5 | 0.000003 | 19.110001 | 1.71988 | 1.04747 | 1.71 | 1.901 | 1.50844 | 1.51798 | 0.000054 | 77.589996 | 91.989998 | 0.000003 | 7.23 | 6.8 | 7.08 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.52 |
Polydimethylsiloxane (PDMS) | Air | 0.892 | 0.875 | -0.3 | 157.100006 | 10 | 0.000234 | 0.19 | 1.47587 | 1.2686 | 2.053 | 2.967 | 1.47107 | 1.47923 | 0.000052 | 73.849998 | 52.959999 | 0.000002 | 1.28 | 0.91 | 1.04 | 1,260 | 1,625 | FDTD | 3.06 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.133 | 0.589 | 15.2 | 99.699997 | 5 | 0.000115 | 0.19 | 1.99402 | 1.01831 | 0.76 | 1.09 | 1.50573 | 1.51243 | 0.000079 | 88.529999 | 14.75 | 0.000005 | 6.58 | 6.38 | 6.29 | 1,260 | 1,625 | FDTD | 4.66 |
SU-8 | Silicon Dioxide (SiO₂) | 1.094 | 0.228 | -1.7 | 105 | 1 | 0.000008 | 0.27 | 1.44185 | 1.18804 | 0.204 | 1.337 | 1.87833 | 1.87995 | 0.000015 | 71.230003 | 88.919998 | 0.000005 | 4.44 | 3.96 | 4.29 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.6 |
SU-8 | Silicon Dioxide (SiO₂) | 1.4 | 0.565 | 2.7 | 196.300003 | 5 | 0.000011 | 0.25 | 1.59838 | 1.39659 | 0.409 | 0.531 | 1.761 | 1.76211 | 0.000006 | 87.989998 | 49.91 | 0.000002 | 1.11 | 0.63 | 0.99 | 1,260 | 1,625 | FDTD | 4.84 |
Polydimethylsiloxane (PDMS) | Air | 1.596 | 0.349 | -35.599998 | 125.400002 | 5 | 0.00017 | 0.18 | 1.51266 | 1.43943 | 0.398 | 1.292 | 1.92786 | 1.92937 | 0.000009 | 72.129997 | 91.269997 | 0.000003 | 1.68 | 1.55 | 1.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.62 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.736 | 0.991 | -16.700001 | 136.600006 | 10 | 0.000003 | 18.459999 | 1.78634 | 1.05677 | 1.261 | 1.651 | 1.86147 | 1.86616 | 0.000031 | 72.459999 | 60.169998 | 0.000004 | 7.63 | 7.43 | 7.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.97 |
Silicon Dioxide (SiO₂) | Air | 1.17 | 0.797 | -49.099998 | 127.900002 | 5 | 0.000001 | 1.34 | 1.68673 | 1.34909 | 2.158 | 2.639 | 1.4154 | 1.4212 | 0.000033 | 85.720001 | 45.459999 | 0.000003 | 9.71 | 9.46 | 9.48 | 1,260 | 1,625 | FDTD | 2.21 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.751 | 0.946 | -6.8 | 197.300003 | 1 | 0.00001 | 0.2 | 1.41698 | 1.43551 | 1.043 | 1.383 | 1.50022 | 1.50128 | 0.000005 | 62.189999 | 31.379999 | 0.000004 | 4.15 | 3.73 | 4.01 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.44 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.028 | 0.787 | -29.6 | 129.899994 | 5 | 0.000003 | 19.379999 | 1.50455 | 1.41471 | 0.142 | 1.189 | 1.9965 | 2.0027 | 0.000039 | 56.900002 | 32.59 | 0.000002 | 8.95 | 8.75 | 8.71 | 1,260 | 1,625 | FDTD | 0.29 |
Silicon Dioxide (SiO₂) | Air | 1.395 | 0.406 | -9.4 | 115.800003 | 10 | 0.000001 | 1.46 | 1.56452 | 1.44641 | 0.693 | 2.039 | 1.60113 | 1.6077 | 0.000052 | 66.410004 | 99.75 | 0.000002 | 6.04 | 5.9 | 5.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.05 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.71 | 0.659 | 4.3 | 162.199997 | 5 | 0.000003 | 17.200001 | 1.77827 | 1.19338 | 1.738 | 2.746 | 1.89372 | 1.90354 | 0.000062 | 77.010002 | 25.709999 | 0.000001 | 5.13 | 4.99 | 4.97 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.67 |
SU-8 | Silicon Dioxide (SiO₂) | 1.602 | 0.212 | 17 | 95.199997 | 1 | 0.000009 | 0.27 | 1.56908 | 1.0201 | 2.545 | 3.754 | 1.67494 | 1.68377 | 0.000113 | 52.5 | 61.889999 | 0.000002 | 2.86 | 2.48 | 2.7 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.72 |
Silicon Nitride (Si₃N₄) | Air | 1.954 | 0.707 | -45.400002 | 86.300003 | 5 | 0.000003 | 16.200001 | 1.52296 | 1.46885 | 2.315 | 3.774 | 1.80188 | 1.80863 | 0.000051 | 72.43 | 70.57 | 0.000003 | 1.98 | 1.82 | 1.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.96 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.81 | 0.583 | -44.599998 | 117.300003 | 1 | 0.000003 | 19.9 | 1.43284 | 1.0164 | 0.93 | 2.267 | 1.88923 | 1.89042 | 0.000007 | 69.540001 | 29.98 | 0.000004 | 2.25 | 1.99 | 1.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.12 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.82 | 0.654 | -27.200001 | 100.900002 | 1 | 0.000238 | 0.16 | 1.89181 | 1.41078 | 0.408 | 1.392 | 1.78271 | 1.79049 | 0.000061 | 75.699997 | 17.93 | 0.000005 | 8.74 | 8.27 | 8.47 | 1,260 | 1,625 | FDTD | 1.79 |
Polydimethylsiloxane (PDMS) | Air | 0.902 | 0.371 | -27.1 | 121 | 5 | 0.00027 | 0.19 | 1.68214 | 1.06524 | 2.554 | 3.043 | 1.46144 | 1.46773 | 0.000042 | 55.09 | 19.65 | 0.000001 | 7.13 | 6.8 | 6.95 | 1,260 | 1,625 | FDTD | 2.91 |
Silicon Dioxide (SiO₂) | Air | 1.933 | 0.576 | -44.200001 | 128 | 10 | 0.000001 | 1.37 | 1.49461 | 1.17075 | 1.017 | 1.272 | 1.58512 | 1.59468 | 0.000056 | 53.740002 | 23.969999 | 0.000004 | 0.54 | 0.4 | 0.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.76 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.25 | 0.972 | 2.2 | 117 | 10 | 0.00023 | 0.16 | 1.95938 | 1.47563 | 2.917 | 3.662 | 1.96021 | 1.96675 | 0.000057 | 55.18 | 95.529999 | 0.000003 | 4.46 | 4.19 | 4.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.9 |
SU-8 | Silicon Dioxide (SiO₂) | 0.683 | 0.64 | -47.5 | 130.100006 | 1 | 0.000007 | 0.26 | 1.4419 | 1.10555 | 0.794 | 1.378 | 1.83377 | 1.83773 | 0.000022 | 72.339996 | 83.07 | 0.000005 | 9.05 | 8.74 | 8.91 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.81 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.726 | 0.656 | -29.9 | 131.600006 | 5 | 0.000003 | 16.25 | 1.83481 | 1.46886 | 0.808 | 1.396 | 1.95195 | 1.95559 | 0.000023 | 54.77 | 30.84 | 0.000001 | 8.71 | 8.59 | 8.55 | 1,260 | 1,625 | FDTD | 2.24 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.507 | 0.319 | -48.400002 | 117.300003 | 10 | 0.000003 | 15.91 | 1.61264 | 1.0684 | 0.112 | 0.909 | 1.93355 | 1.94039 | 0.000041 | 63.369999 | 15.9 | 0.000005 | 8.73 | 8.54 | 8.4 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.05 |
SU-8 | Air | 1.312 | 0.482 | -47.599998 | 118.599998 | 10 | 0.00001 | 0.21 | 1.60093 | 1.47248 | 0.559 | 1.621 | 1.67729 | 1.68012 | 0.000017 | 53.610001 | 97.93 | 0.000001 | 0.59 | 0.12 | 0.31 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.61 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.509 | 0.309 | -40.700001 | 165.100006 | 5 | 0.000212 | 0.17 | 1.70831 | 1.27794 | 1.856 | 2.732 | 1.40776 | 1.41211 | 0.000021 | 84.739998 | 20.530001 | 0.000001 | 6.88 | 6.58 | 6.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.95 |
Silicon Dioxide (SiO₂) | Air | 1.256 | 0.416 | 3.5 | 166.199997 | 5 | 0.000001 | 1.41 | 1.79535 | 1.24358 | 2.857 | 3.841 | 1.72215 | 1.727 | 0.00003 | 53.799999 | 64.93 | 0.000002 | 9.27 | 8.93 | 8.92 | 1,260 | 1,625 | FDTD | 4.25 |
Polydimethylsiloxane (PDMS) | Air | 0.991 | 0.609 | -25.700001 | 184.600006 | 1 | 0.000224 | 0.18 | 1.69415 | 1.48243 | 0.371 | 1.683 | 1.74194 | 1.75112 | 0.000044 | 65.309998 | 69.43 | 0.000003 | 5.32 | 4.98 | 5.17 | 1,260 | 1,625 | FDTD | 2.52 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.666 | 0.714 | -46.200001 | 191.899994 | 5 | 0.000001 | 1.47 | 1.53056 | 1.41138 | 1.893 | 2.828 | 1.638 | 1.64281 | 0.00002 | 52.959999 | 92.589996 | 0.000005 | 2.56 | 2.12 | 2.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.29 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.55 | 0.75 | 6.3 | 95.599998 | 10 | 0.000001 | 1.33 | 1.61825 | 1.09481 | 1.174 | 1.744 | 1.58576 | 1.58847 | 0.00003 | 62.779999 | 38.560001 | 0.000003 | 7.48 | 7.15 | 7.04 | 1,260 | 1,625 | FDTD | 1.2 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.663 | 0.503 | 8.9 | 119.400002 | 10 | 0.000009 | 0.23 | 1.77784 | 1.43777 | 0.261 | 1.421 | 1.44897 | 1.45486 | 0.000053 | 76.660004 | 36.59 | 0 | 5.09 | 4.89 | 4.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.3 |
Silicon Dioxide (SiO₂) | Air | 0.665 | 0.264 | -4.5 | 172.600006 | 10 | 0.000001 | 1.45 | 1.53451 | 1.20254 | 0.882 | 1.336 | 1.46019 | 1.46371 | 0.00002 | 59.419998 | 74.25 | 0.000002 | 8.12 | 7.92 | 7.92 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.53 |
SU-8 | Silicon Dioxide (SiO₂) | 1.879 | 0.972 | -32.200001 | 182.699997 | 5 | 0.000008 | 0.24 | 1.64315 | 1.24824 | 1.397 | 1.557 | 1.57446 | 1.58011 | 0.000026 | 50.950001 | 36.439999 | 0.000004 | 8.58 | 8.33 | 8.48 | 1,260 | 1,625 | FDTD | 3.46 |
Polydimethylsiloxane (PDMS) | Air | 1.575 | 0.492 | -5.3 | 177 | 10 | 0.000181 | 0.18 | 1.50809 | 1.25775 | 0.135 | 0.909 | 1.68423 | 1.6881 | 0.000021 | 60.759998 | 40.32 | 0.000004 | 1.15 | 0.95 | 1.04 | 1,260 | 1,625 | FDTD | 3.41 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.831 | 0.312 | 9.3 | 81.800003 | 1 | 0.000001 | 1.5 | 1.90126 | 1.33053 | 1.41 | 1.524 | 1.6836 | 1.6866 | 0.000041 | 77.43 | 32.560001 | 0.000001 | 9.6 | 9.1 | 9.27 | 1,260 | 1,625 | FDTD | 4.89 |
Silicon Dioxide (SiO₂) | Air | 0.69 | 0.362 | -45.400002 | 91.699997 | 5 | 0.000001 | 1.49 | 1.74267 | 1.18344 | 1.923 | 3.037 | 1.60026 | 1.60953 | 0.000068 | 59.400002 | 64.379997 | 0.000001 | 9.36 | 8.91 | 9.21 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.57 |
Polydimethylsiloxane (PDMS) | Air | 1.269 | 0.652 | -20.700001 | 157.600006 | 1 | 0.000153 | 0.16 | 1.94219 | 1.32592 | 1.925 | 2.406 | 1.40945 | 1.41275 | 0.000019 | 83.57 | 42.18 | 0.000004 | 3.88 | 3.71 | 3.45 | 1,260 | 1,625 | FDTD | 1.04 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.874 | 0.393 | -29.4 | 83.300003 | 10 | 0.000003 | 18.74 | 1.63394 | 1.09212 | 1.825 | 2.411 | 1.9429 | 1.94612 | 0.000029 | 62.919998 | 79.440002 | 0.000002 | 1.35 | 0.95 | 1.09 | 1,260 | 1,625 | FDTD | 1.92 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.61 | 0.551 | 3.1 | 113.400002 | 10 | 0.000128 | 0.15 | 1.88291 | 1.12784 | 0.435 | 1.9 | 1.66522 | 1.66717 | 0.000018 | 75.889999 | 89.360001 | 0.000001 | 1.93 | 1.76 | 1.47 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.77 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.755 | 0.882 | -8.4 | 157.800003 | 5 | 0.000003 | 16.41 | 1.63252 | 1.28084 | 0.766 | 1.629 | 1.41311 | 1.41754 | 0.000027 | 60.139999 | 64.800003 | 0.000002 | 7.9 | 7.48 | 7.69 | 1,260 | 1,625 | FDTD | 0.82 |
Polydimethylsiloxane (PDMS) | Air | 1.088 | 0.499 | 15.6 | 178.600006 | 10 | 0.000196 | 0.17 | 1.98062 | 1.37264 | 0.471 | 0.694 | 1.71603 | 1.72567 | 0.000059 | 85.720001 | 14.41 | 0 | 3.52 | 3.26 | 3.21 | 1,260 | 1,625 | FDTD | 4.84 |
Silicon Dioxide (SiO₂) | Air | 1.926 | 0.73 | 6.1 | 163.300003 | 1 | 0.000001 | 1.33 | 1.96481 | 1.09819 | 1.5 | 2.348 | 1.82614 | 1.83357 | 0.000047 | 59.369999 | 63.43 | 0 | 6.88 | 6.64 | 6.68 | 1,260 | 1,625 | FDTD | 1.95 |
Silicon Dioxide (SiO₂) | Air | 0.529 | 0.605 | -47 | 174.199997 | 1 | 0.000001 | 1.43 | 1.50848 | 1.20238 | 1.786 | 2.647 | 1.93364 | 1.93838 | 0.000021 | 60.330002 | 49.349998 | 0.000002 | 2.11 | 1.86 | 1.97 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.82 |
Polymethyl Methacrylate (PMMA) | Air | 1.695 | 0.809 | -47.599998 | 154.300003 | 5 | 0.00001 | 0.19 | 1.93971 | 1.01661 | 1.838 | 3.084 | 1.81065 | 1.82037 | 0.000048 | 56.34 | 70.440002 | 0 | 0.62 | 0.48 | 0.39 | 1,260 | 1,625 | FDTD | 4.25 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.548 | 0.22 | -3 | 108.800003 | 5 | 0.000223 | 0.19 | 1.42962 | 1.23462 | 2.568 | 3.677 | 1.58129 | 1.58471 | 0.000031 | 54.189999 | 53.099998 | 0.000005 | 4.01 | 3.87 | 3.68 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.95 |
SU-8 | Air | 1.661 | 0.286 | -45.599998 | 111 | 10 | 0.000011 | 0.21 | 1.96355 | 1.12319 | 0.726 | 2.062 | 1.66824 | 1.67102 | 0.000018 | 59.740002 | 30.969999 | 0.000002 | 7.74 | 7.36 | 7.62 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.13 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.829 | 0.679 | 11.9 | 117.699997 | 10 | 0.000003 | 19.940001 | 1.62122 | 1.34481 | 0.23 | 1.283 | 1.55254 | 1.56116 | 0.000081 | 60.68 | 66.379997 | 0.000001 | 7.37 | 7.14 | 6.94 | 1,260 | 1,625 | FDTD | 1.78 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.971 | 0.529 | -49 | 88.699997 | 1 | 0.000003 | 17.540001 | 1.50635 | 1.02684 | 1.62 | 2.31 | 1.79545 | 1.7966 | 0.000008 | 59.619999 | 99.599998 | 0.000002 | 1.82 | 1.38 | 1.41 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.64 |
Silicon Dioxide (SiO₂) | Air | 1.994 | 0.976 | -8.1 | 127.800003 | 10 | 0.000001 | 1.42 | 1.72581 | 1.30657 | 0.925 | 1.267 | 1.48024 | 1.48484 | 0.000034 | 60.720001 | 59.139999 | 0 | 0.82 | 0.68 | 0.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.11 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.879 | 0.414 | 6.7 | 186.899994 | 1 | 0.000001 | 1.3 | 1.74002 | 1.06301 | 0.311 | 1.445 | 1.66265 | 1.67137 | 0.000048 | 68.900002 | 80.919998 | 0.000003 | 5.01 | 4.83 | 4.6 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.71 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.611 | 0.444 | -1 | 144.800003 | 10 | 0.000001 | 1.46 | 1.72081 | 1.27629 | 1.195 | 1.34 | 1.50687 | 1.51651 | 0.000066 | 75.230003 | 86.760002 | 0.000003 | 1.25 | 0.83 | 1.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.56 |
Polymethyl Methacrylate (PMMA) | Air | 1.879 | 0.456 | -42.599998 | 113.099998 | 10 | 0.000012 | 0.19 | 1.68289 | 1.06072 | 1.33 | 2.47 | 1.46758 | 1.47606 | 0.000054 | 66.029999 | 12.64 | 0.000003 | 8.72 | 8.43 | 8.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.31 |
SU-8 | Air | 1.173 | 0.337 | 7.8 | 154.5 | 10 | 0.000011 | 0.26 | 1.40902 | 1.44255 | 0.264 | 0.55 | 1.72969 | 1.73464 | 0.000034 | 54.830002 | 31.190001 | 0.000003 | 4.7 | 4.38 | 4.24 | 1,260 | 1,625 | FDTD | 3.41 |
SU-8 | Silicon Dioxide (SiO₂) | 0.927 | 0.911 | -38.599998 | 119.5 | 1 | 0.00001 | 0.21 | 1.54777 | 1.02555 | 1.401 | 2.797 | 1.69774 | 1.70181 | 0.000026 | 54.540001 | 21.540001 | 0.000002 | 8.79 | 8.68 | 8.3 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.85 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.486 | 0.341 | -27.299999 | 120.400002 | 5 | 0.000003 | 15.73 | 1.55077 | 1.28376 | 1.109 | 2.266 | 1.99028 | 1.99146 | 0.000008 | 64.459999 | 14.15 | 0.000003 | 3.4 | 3.3 | 3.16 | 1,260 | 1,625 | FDTD | 3.15 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.456 | 0.566 | -17.4 | 189.600006 | 5 | 0.000117 | 0.18 | 1.73541 | 1.16983 | 2.831 | 3.978 | 1.90416 | 1.90592 | 0.000009 | 58 | 87.519997 | 0.000003 | 4.6 | 4.14 | 4.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.69 |
SU-8 | Silicon Dioxide (SiO₂) | 1.761 | 0.708 | 19.299999 | 84.300003 | 1 | 0.000007 | 0.26 | 1.79907 | 1.43153 | 0.24 | 0.358 | 1.59153 | 1.59998 | 0.00013 | 71.18 | 87.110001 | 0.000001 | 8.89 | 8.64 | 8.78 | 1,260 | 1,625 | FDTD | 1.71 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.034 | 0.476 | 16 | 165.199997 | 10 | 0.000015 | 0.22 | 1.57618 | 1.26174 | 0.495 | 0.87 | 1.98285 | 1.98723 | 0.000029 | 68.599998 | 16.190001 | 0.000003 | 1.5 | 1.23 | 1.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.57 |
Silicon Dioxide (SiO₂) | Air | 0.641 | 0.773 | -11.8 | 147.399994 | 10 | 0.000001 | 1.37 | 1.49954 | 1.09477 | 2.072 | 3.468 | 1.649 | 1.65251 | 0.000022 | 89.889999 | 97.690002 | 0.000005 | 5.91 | 5.65 | 5.63 | 1,260 | 1,625 | FDTD | 0.11 |
Polydimethylsiloxane (PDMS) | Air | 0.84 | 0.359 | 19.1 | 151.199997 | 1 | 0.00027 | 0.16 | 1.6184 | 1.09587 | 1.397 | 2.551 | 1.87799 | 1.88469 | 0.000051 | 56.799999 | 12.75 | 0.000001 | 1.55 | 1.29 | 1.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.39 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.653 | 0.889 | -0.8 | 88.300003 | 5 | 0.000001 | 1.3 | 1.93915 | 1.43209 | 2.449 | 3.32 | 1.97736 | 1.98197 | 0.000052 | 89.349998 | 93.57 | 0 | 6.87 | 6.57 | 6.72 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.31 |
Silicon Nitride (Si₃N₄) | Air | 1.684 | 0.233 | -0.4 | 154 | 1 | 0.000003 | 19.870001 | 1.8835 | 1.31105 | 1.027 | 2.418 | 1.87229 | 1.87954 | 0.000047 | 57.330002 | 98.849998 | 0.000001 | 8.92 | 8.53 | 8.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.5 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.589 | 0.767 | -49 | 91.900002 | 10 | 0.000288 | 0.2 | 1.58732 | 1.24857 | 0.193 | 1.131 | 1.66024 | 1.66357 | 0.000024 | 66.129997 | 79.269997 | 0.000004 | 0.75 | 0.56 | 0.55 | 1,260 | 1,625 | FDTD | 1.81 |
Silicon Dioxide (SiO₂) | Air | 0.593 | 0.271 | -24.6 | 179 | 5 | 0.000001 | 1.4 | 1.70215 | 1.33897 | 0.429 | 1.459 | 1.57035 | 1.57223 | 0.000009 | 53.970001 | 65.010002 | 0.000005 | 4.97 | 4.53 | 4.83 | 1,260 | 1,625 | FDTD | 1.03 |
Polymethyl Methacrylate (PMMA) | Air | 0.66 | 0.664 | -36.5 | 98.300003 | 5 | 0.000008 | 0.23 | 1.40096 | 1.4406 | 2.585 | 3.443 | 1.97024 | 1.9745 | 0.000032 | 76.970001 | 73.129997 | 0.000004 | 5.76 | 5.36 | 5.61 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.47 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.274 | 0.217 | -16.200001 | 196.800003 | 10 | 0.000234 | 0.16 | 1.42667 | 1.27535 | 1.561 | 1.728 | 1.63243 | 1.63759 | 0.000024 | 52.860001 | 20.27 | 0.000003 | 5.67 | 5.4 | 5.26 | 1,260 | 1,625 | FDTD | 3.89 |
Polydimethylsiloxane (PDMS) | Air | 0.593 | 0.484 | -33.900002 | 88.099998 | 1 | 0.000217 | 0.19 | 1.6875 | 1.0985 | 2.877 | 4.375 | 1.47344 | 1.48076 | 0.00006 | 62.990002 | 40.970001 | 0.000002 | 8.67 | 8.53 | 8.35 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.4 |
Polydimethylsiloxane (PDMS) | Air | 1.627 | 0.561 | -33.200001 | 141.800003 | 5 | 0.000229 | 0.16 | 1.99739 | 1.18092 | 1.784 | 2.849 | 1.41676 | 1.42217 | 0.000031 | 72.690002 | 30.059999 | 0.000001 | 8.42 | 8.3 | 7.97 | 1,260 | 1,625 | FDTD | 3.11 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.93 | 0.795 | -49.5 | 194.699997 | 5 | 0.000275 | 0.17 | 1.70494 | 1.3248 | 2.501 | 2.724 | 1.73305 | 1.73759 | 0.000019 | 51.32 | 57.150002 | 0.000001 | 5.35 | 5.09 | 5.24 | 1,260 | 1,625 | FDTD | 0.26 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.825 | 0.305 | -35.900002 | 142.899994 | 1 | 0.000155 | 0.17 | 1.46561 | 1.1344 | 1.21 | 1.797 | 1.92652 | 1.93548 | 0.00005 | 71.220001 | 34.459999 | 0.000003 | 4.38 | 3.9 | 4.01 | 1,260 | 1,625 | FDTD | 1.96 |
SU-8 | Air | 1.778 | 0.631 | -29.799999 | 186.899994 | 1 | 0.000011 | 0.28 | 1.77605 | 1.38778 | 2.69 | 2.971 | 1.82411 | 1.83318 | 0.000042 | 58.060001 | 22.92 | 0.000005 | 0.68 | 0.22 | 0.39 | 1,260 | 1,625 | FDTD | 3.3 |
SU-8 | Air | 0.939 | 0.955 | 6.2 | 167.5 | 1 | 0.000007 | 0.22 | 1.61585 | 1.39496 | 0.329 | 0.802 | 1.82787 | 1.83568 | 0.000048 | 74.260002 | 33.439999 | 0.000004 | 7.37 | 6.98 | 7.2 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.76 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.967 | 0.221 | -29.299999 | 196.5 | 10 | 0.000001 | 1.47 | 1.64343 | 1.11354 | 2.063 | 3.508 | 1.9136 | 1.92212 | 0.000038 | 53.139999 | 48.049999 | 0.000004 | 9.35 | 9.17 | 8.87 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.66 |
Silicon Nitride (Si₃N₄) | Air | 1.883 | 0.531 | -24.5 | 122.800003 | 1 | 0.000003 | 15.64 | 1.46454 | 1.10741 | 0.421 | 1.8 | 1.93099 | 1.93405 | 0.000021 | 75.269997 | 28.75 | 0.000002 | 9.24 | 9.12 | 9.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.5 |
Silicon Dioxide (SiO₂) | Air | 1.252 | 0.354 | 3.6 | 114.800003 | 10 | 0.000001 | 1.49 | 1.97386 | 1.28942 | 2.359 | 3.323 | 1.56461 | 1.57242 | 0.00007 | 63 | 58.91 | 0.000002 | 4.38 | 4.09 | 4.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.82 |
Silicon Dioxide (SiO₂) | Air | 1.564 | 0.992 | -29.6 | 116.599998 | 10 | 0.000001 | 1.45 | 1.55066 | 1.48961 | 1.155 | 1.265 | 1.52825 | 1.53309 | 0.000033 | 78.949997 | 28.18 | 0.000001 | 1.92 | 1.43 | 1.57 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.19 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.929 | 0.558 | 4.7 | 132.399994 | 5 | 0.000003 | 17.629999 | 1.79108 | 1.32587 | 0.959 | 2.052 | 1.40477 | 1.41227 | 0.000059 | 89.010002 | 69.949997 | 0.000002 | 1.55 | 1.28 | 1.36 | 1,260 | 1,625 | FDTD | 2.57 |
Silicon Nitride (Si₃N₄) | Air | 0.856 | 0.34 | 14.9 | 179.399994 | 1 | 0.000003 | 16.200001 | 1.57651 | 1.26915 | 2.252 | 3.424 | 1.48042 | 1.48586 | 0.000033 | 64.080002 | 52.59 | 0.000004 | 6.55 | 6.44 | 6.06 | 1,260 | 1,625 | FDTD | 0.84 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.774 | 0.81 | -30 | 130.899994 | 1 | 0.000187 | 0.18 | 1.64997 | 1.2303 | 1.547 | 2.576 | 1.85357 | 1.85467 | 0.000007 | 60.759998 | 92.089996 | 0.000001 | 9.56 | 9.09 | 9.27 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.63 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.334 | 0.621 | -16.700001 | 83.800003 | 5 | 0.000011 | 0.25 | 1.9361 | 1.42914 | 0.842 | 1.448 | 1.71112 | 1.71611 | 0.00005 | 57.939999 | 76.330002 | 0.000002 | 6.77 | 6.41 | 6.65 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.29 |
SU-8 | Air | 1.539 | 0.459 | -13.6 | 162.5 | 1 | 0.000007 | 0.23 | 1.43404 | 1.1573 | 0.589 | 1.198 | 1.80866 | 1.8148 | 0.000035 | 72.459999 | 50.869999 | 0.000003 | 6.14 | 6.03 | 5.94 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.55 |
Polymethyl Methacrylate (PMMA) | Air | 1.091 | 0.203 | -47.200001 | 179.5 | 1 | 0.000013 | 0.21 | 1.82218 | 1.43779 | 0.541 | 1.18 | 1.43541 | 1.43903 | 0.000016 | 63.77 | 54.279999 | 0 | 5.22 | 4.75 | 4.82 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.07 |
SU-8 | Air | 0.992 | 0.563 | -47.900002 | 147.199997 | 1 | 0.00001 | 0.24 | 1.6217 | 1.40482 | 2.235 | 2.465 | 1.95335 | 1.95508 | 0.000009 | 55.560001 | 75.510002 | 0 | 9.26 | 8.83 | 9.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.58 |
Silicon Nitride (Si₃N₄) | Air | 1.353 | 0.978 | -9.2 | 186.100006 | 1 | 0.000003 | 17.51 | 1.70075 | 1.23888 | 2.148 | 3.462 | 1.48179 | 1.48738 | 0.000029 | 89.019997 | 94.82 | 0.000005 | 9.7 | 9.5 | 9.27 | 1,260 | 1,625 | FDTD | 0.87 |
Polymethyl Methacrylate (PMMA) | Air | 0.986 | 0.664 | -23.6 | 132.300003 | 5 | 0.000008 | 0.25 | 1.73632 | 1.12643 | 1.748 | 2.467 | 1.56352 | 1.56539 | 0.000012 | 64.970001 | 95.519997 | 0.000002 | 9.81 | 9.49 | 9.37 | 1,260 | 1,625 | FDTD | 1.24 |
Silicon Dioxide (SiO₂) | Air | 1.524 | 0.439 | 4.5 | 102.900002 | 10 | 0.000001 | 1.39 | 1.81775 | 1.34359 | 0.98 | 1.422 | 1.90339 | 1.9057 | 0.000023 | 70.489998 | 20.620001 | 0.000002 | 2.6 | 2.23 | 2.41 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.45 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.959 | 0.544 | -5.8 | 165.199997 | 10 | 0.000001 | 1.32 | 1.96686 | 1.18493 | 2.083 | 3.199 | 1.47235 | 1.48131 | 0.000052 | 57.200001 | 18.040001 | 0.000002 | 3.63 | 3.51 | 3.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.47 |
SU-8 | Silicon Dioxide (SiO₂) | 1.451 | 0.537 | -23 | 196.899994 | 5 | 0.00001 | 0.27 | 1.49089 | 1.0254 | 2.503 | 2.943 | 1.48278 | 1.48434 | 0.000007 | 76.650002 | 36.169998 | 0.000001 | 1.33 | 0.89 | 1 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.52 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.671 | 0.796 | 19.9 | 111.5 | 10 | 0.000003 | 15.41 | 1.43404 | 1.34279 | 0.673 | 1.091 | 1.5188 | 1.52396 | 0.000056 | 72.989998 | 39.950001 | 0.000005 | 8.44 | 7.96 | 8.09 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.67 |
Polymethyl Methacrylate (PMMA) | Air | 1.785 | 0.496 | -49 | 138.699997 | 5 | 0.000013 | 0.21 | 1.93402 | 1.02539 | 0.397 | 1 | 1.53906 | 1.54487 | 0.000031 | 67.75 | 36.580002 | 0.000003 | 9.42 | 9 | 9.19 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.92 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.741 | 0.617 | -3.1 | 92.300003 | 5 | 0.000013 | 0.2 | 1.92868 | 1.13075 | 2.105 | 2.936 | 1.47891 | 1.48205 | 0.000033 | 75.919998 | 36.509998 | 0.000001 | 2.7 | 2.32 | 2.56 | 1,260 | 1,625 | FDTD | 1.48 |
Silicon Dioxide (SiO₂) | Air | 1.658 | 0.823 | -8.8 | 191.399994 | 5 | 0.000001 | 1.44 | 1.85943 | 1.10096 | 0.748 | 1.714 | 1.78213 | 1.78999 | 0.000039 | 62.16 | 97.480003 | 0 | 4.08 | 3.74 | 3.71 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.44 |
Polymethyl Methacrylate (PMMA) | Air | 1.559 | 0.944 | 0.4 | 95.599998 | 10 | 0.000013 | 0.25 | 1.90087 | 1.37197 | 2.121 | 3.026 | 1.68497 | 1.6938 | 0.000093 | 75.580002 | 88.010002 | 0.000004 | 7.39 | 7.04 | 7.15 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.79 |
Polymethyl Methacrylate (PMMA) | Air | 1.915 | 0.254 | -47.799999 | 168 | 5 | 0.000012 | 0.24 | 1.60149 | 1.20099 | 2.724 | 3.413 | 1.8635 | 1.8723 | 0.000041 | 69.940002 | 37.98 | 0.000001 | 8.94 | 8.55 | 8.49 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.49 |
SU-8 | Silicon Dioxide (SiO₂) | 1.268 | 0.69 | -38.200001 | 102.699997 | 1 | 0.000007 | 0.24 | 1.81727 | 1.31519 | 1.202 | 1.882 | 1.60761 | 1.60944 | 0.000013 | 76.610001 | 90.080002 | 0 | 9.8 | 9.35 | 9.37 | 1,260 | 1,625 | FDTD | 3.34 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.799 | 0.4 | -17.6 | 191.600006 | 5 | 0.00001 | 0.22 | 1.66028 | 1.41108 | 2.748 | 3.503 | 1.41524 | 1.41641 | 0.000006 | 86.68 | 15.13 | 0.000003 | 2.42 | 2.17 | 2.19 | 1,260 | 1,625 | FDTD | 1.52 |
SU-8 | Air | 1.981 | 0.458 | -16.299999 | 158.600006 | 5 | 0.000007 | 0.24 | 1.40481 | 1.08693 | 0.905 | 1.422 | 1.592 | 1.59546 | 0.00002 | 81.339996 | 98.209999 | 0 | 1.14 | 0.92 | 0.66 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.26 |
Silicon Nitride (Si₃N₄) | Air | 0.737 | 0.519 | -29.5 | 181.199997 | 10 | 0.000003 | 17.110001 | 1.50041 | 1.36784 | 0.542 | 1.456 | 1.54156 | 1.55005 | 0.00004 | 73.839996 | 94.019997 | 0.000005 | 6.55 | 6.29 | 6.33 | 1,260 | 1,625 | FDTD | 3.64 |
Polydimethylsiloxane (PDMS) | Air | 0.859 | 0.654 | -9.8 | 160.800003 | 5 | 0.000236 | 0.18 | 1.5795 | 1.44793 | 0.977 | 2.465 | 1.64185 | 1.64749 | 0.000033 | 64.059998 | 98.779999 | 0.000004 | 5.84 | 5.64 | 5.58 | 1,260 | 1,625 | FDTD | 3.29 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.628 | 0.247 | -24.799999 | 107.400002 | 10 | 0.000001 | 1.39 | 1.79129 | 1.25787 | 0.912 | 1.21 | 1.72983 | 1.73492 | 0.000038 | 86.75 | 89.93 | 0.000001 | 4.16 | 3.68 | 3.76 | 1,260 | 1,625 | FDTD | 0.81 |
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