waveguide_material
stringclasses 5
values | cladding_material
stringclasses 2
values | waveguide_width
float32 0.5
2
| waveguide_height
float32 0.2
1
| temperature_min
float32 -50
20
| temperature_max
float32 80
200
| temperature_step
float32 1
10
| thermal_expansion_coefficient
float32 0
0
| thermal_conductivity
float32 0.15
20
| refractive_index_core
float32 1.4
2
| refractive_index_cladding
float32 1
1.5
| propagation_loss_min
float32 0.1
3
| propagation_loss_max
float32 0.21
4.5
| effective_index_min
float32 1.4
2
| effective_index_max
float32 1.4
2.01
| dn_dT
float32 0
0
| thermal_tuning_efficiency
float32 50
90
| thermal_stress
float32 10
100
| strain_rate
float32 0
0
| optical_power_input
float32 0.5
10
| optical_power_output_min
float32 0
9.89
| optical_power_output_max
float32 0
9.89
| wavelength_min
float32 1.26k
1.26k
| wavelength_max
float32 1.63k
1.63k
| simulation_model
stringclasses 2
values | measurement_uncertainty
float32 0.1
5
|
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
Silicon Nitride (Si₃N₄) | Air | 1.522 | 0.754 | -0.9 | 191.899994 | 10 | 0.000003 | 15.01 | 1.59178 | 1.39398 | 2.788 | 3.263 | 1.89239 | 1.89429 | 0.00001 | 86.779999 | 53.240002 | 0.000004 | 8.12 | 7.93 | 7.9 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.88 |
Silicon Nitride (Si₃N₄) | Air | 1.894 | 0.795 | -1 | 165.300003 | 1 | 0.000003 | 15.14 | 1.47548 | 1.06859 | 2.741 | 3.183 | 1.51493 | 1.5166 | 0.00001 | 56.310001 | 77.690002 | 0.000004 | 0.51 | 0.4 | 0.14 | 1,260 | 1,625 | FDTD | 1.4 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.907 | 0.266 | -30.799999 | 199.600006 | 1 | 0.000013 | 0.22 | 1.70063 | 1.01133 | 0.106 | 1.08 | 1.64522 | 1.65478 | 0.000041 | 59.919998 | 60.360001 | 0.000004 | 4.89 | 4.61 | 4.42 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.39 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.248 | 0.684 | -29.5 | 157.399994 | 5 | 0.000234 | 0.17 | 1.41593 | 1.34702 | 2.885 | 3.194 | 1.74021 | 1.7464 | 0.000033 | 73.599998 | 49.310001 | 0.000004 | 2.59 | 2.27 | 2.4 | 1,260 | 1,625 | FDTD | 0.28 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.777 | 0.565 | -25.299999 | 97.699997 | 10 | 0.000149 | 0.16 | 1.78694 | 1.00921 | 2.568 | 3.789 | 1.68322 | 1.69004 | 0.000055 | 73.809998 | 15.95 | 0.000004 | 1.61 | 1.24 | 1.4 | 1,260 | 1,625 | FDTD | 0.99 |
Polymethyl Methacrylate (PMMA) | Air | 0.67 | 0.404 | -21.5 | 174.199997 | 10 | 0.000015 | 0.25 | 1.91863 | 1.46645 | 1.589 | 2.731 | 1.45779 | 1.46007 | 0.000012 | 87.949997 | 37.830002 | 0.000002 | 1.55 | 1.21 | 1.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.56 |
Silicon Dioxide (SiO₂) | Air | 1.737 | 0.775 | 2.9 | 195.199997 | 1 | 0.000001 | 1.5 | 1.47487 | 1.23791 | 0.29 | 0.928 | 1.41253 | 1.41575 | 0.000017 | 79.029999 | 56.189999 | 0.000005 | 5.79 | 5.37 | 5.51 | 1,260 | 1,625 | FDTD | 4.36 |
Silicon Dioxide (SiO₂) | Air | 0.699 | 0.237 | -25 | 135 | 1 | 0.000001 | 1.39 | 1.48478 | 1.10422 | 0.131 | 0.833 | 1.76553 | 1.7751 | 0.00006 | 57.740002 | 64.730003 | 0.000001 | 6.75 | 6.26 | 6.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.54 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.833 | 0.847 | -43.799999 | 194.199997 | 5 | 0.000003 | 17.870001 | 1.40664 | 1.1846 | 1.829 | 2.282 | 1.90878 | 1.91737 | 0.000036 | 75.07 | 91.099998 | 0.000003 | 7.26 | 6.88 | 6.99 | 1,260 | 1,625 | FDTD | 1.04 |
Polymethyl Methacrylate (PMMA) | Air | 1.924 | 0.943 | -11.2 | 90.199997 | 10 | 0.00001 | 0.19 | 1.61029 | 1.40024 | 1.586 | 2.964 | 1.56639 | 1.5684 | 0.00002 | 61.639999 | 90.419998 | 0.000001 | 7.37 | 7.18 | 6.94 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.69 |
Polymethyl Methacrylate (PMMA) | Air | 1.962 | 0.895 | -30.5 | 100 | 10 | 0.000007 | 0.21 | 1.79342 | 1.02113 | 2.574 | 3.451 | 1.51887 | 1.52716 | 0.000064 | 50.060001 | 44.759998 | 0.000002 | 8.36 | 8.14 | 7.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.07 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.718 | 0.762 | 16.1 | 184.399994 | 1 | 0.000237 | 0.16 | 1.87334 | 1.0228 | 2.391 | 3.053 | 1.91869 | 1.92209 | 0.00002 | 67.779999 | 69.160004 | 0.000001 | 3.68 | 3.22 | 3.27 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.45 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.64 | 0.714 | -37.900002 | 119.800003 | 1 | 0.000003 | 18.110001 | 1.71245 | 1.48354 | 2.59 | 3.927 | 1.4493 | 1.45708 | 0.000049 | 65.160004 | 43.59 | 0 | 5.5 | 5.13 | 5.18 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.06 |
SU-8 | Air | 1.426 | 0.774 | -37.5 | 132.699997 | 1 | 0.000012 | 0.28 | 1.4478 | 1.05229 | 1.487 | 1.666 | 1.83055 | 1.83401 | 0.00002 | 76.489998 | 47.93 | 0.000004 | 2.68 | 2.42 | 2.47 | 1,260 | 1,625 | FDTD | 3.19 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.696 | 0.824 | -10.2 | 167.199997 | 10 | 0.000001 | 1.31 | 1.62479 | 1.23595 | 2.602 | 3.146 | 1.89824 | 1.8999 | 0.000009 | 75.779999 | 23.360001 | 0.000001 | 6.66 | 6.45 | 6.31 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.45 |
SU-8 | Silicon Dioxide (SiO₂) | 0.572 | 0.864 | 7.4 | 192.5 | 5 | 0.000008 | 0.28 | 1.6997 | 1.20687 | 1.945 | 2.656 | 1.51071 | 1.51428 | 0.000019 | 76.660004 | 14.27 | 0.000003 | 2.38 | 2.23 | 1.98 | 1,260 | 1,625 | FDTD | 0.51 |
Silicon Dioxide (SiO₂) | Air | 1.702 | 0.882 | -6 | 116.599998 | 10 | 0.000001 | 1.39 | 1.61535 | 1.49249 | 1.083 | 1.365 | 1.79318 | 1.79518 | 0.000016 | 74.169998 | 77.709999 | 0.000004 | 6.07 | 5.82 | 5.83 | 1,260 | 1,625 | FDTD | 0.16 |
Silicon Dioxide (SiO₂) | Air | 1.958 | 0.575 | -34.5 | 156.600006 | 5 | 0.000001 | 1.39 | 1.4042 | 1.17739 | 1.543 | 2.084 | 1.77437 | 1.78298 | 0.000045 | 58.880001 | 20.629999 | 0.000001 | 5.2 | 5.01 | 4.97 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.89 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.583 | 0.715 | -36.900002 | 178.699997 | 10 | 0.000001 | 1.38 | 1.45151 | 1.46032 | 0.885 | 1.993 | 1.89252 | 1.89772 | 0.000024 | 80.889999 | 43.66 | 0.000001 | 9.8 | 9.31 | 9.39 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.37 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.288 | 0.441 | 2.3 | 129.800003 | 1 | 0.000003 | 17.790001 | 1.80994 | 1.13698 | 1.2 | 1.574 | 1.82469 | 1.83243 | 0.000061 | 61.009998 | 33.599998 | 0.000001 | 4.02 | 3.9 | 3.89 | 1,260 | 1,625 | FDTD | 2.39 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 0.996 | 0.346 | -20.200001 | 190.899994 | 1 | 0.000001 | 1.34 | 1.55714 | 1.08422 | 0.967 | 1.532 | 1.76778 | 1.77165 | 0.000018 | 70.089996 | 78.43 | 0.000004 | 7.27 | 6.97 | 6.97 | 1,260 | 1,625 | FDTD | 0.89 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.268 | 0.913 | -4.4 | 188.199997 | 5 | 0.000008 | 0.23 | 1.59297 | 1.34402 | 1.74 | 2.804 | 1.61225 | 1.61391 | 0.000009 | 58.880001 | 59.599998 | 0.000003 | 5.46 | 4.98 | 5.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.08 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.519 | 0.499 | -13.3 | 112.099998 | 10 | 0.000001 | 1.34 | 1.51333 | 1.06255 | 1.024 | 2.468 | 1.49934 | 1.50605 | 0.000054 | 87.75 | 86.629997 | 0.000003 | 6.02 | 5.9 | 5.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.16 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.393 | 0.421 | 0.4 | 165.899994 | 1 | 0.000265 | 0.17 | 1.74845 | 1.25935 | 1.912 | 2.966 | 1.68185 | 1.68719 | 0.000032 | 78.910004 | 41 | 0.000002 | 6.03 | 5.8 | 5.64 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.54 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.652 | 0.212 | -16.9 | 97.199997 | 10 | 0.000003 | 16.16 | 1.73822 | 1.24797 | 0.945 | 1.51 | 1.56754 | 1.57105 | 0.000031 | 73.75 | 14.85 | 0.000004 | 2.53 | 2.14 | 2.34 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.28 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.131 | 0.263 | -14.5 | 189.100006 | 5 | 0.000009 | 0.2 | 1.77547 | 1.39519 | 1.234 | 2.121 | 1.72101 | 1.72281 | 0.000009 | 57.849998 | 67.050003 | 0.000005 | 4.58 | 4.15 | 4.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.83 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.337 | 0.705 | -35 | 156.199997 | 5 | 0.000161 | 0.16 | 1.67296 | 1.43929 | 0.122 | 0.58 | 1.67702 | 1.68263 | 0.000029 | 50.09 | 73.93 | 0.000002 | 7.27 | 6.9 | 7.03 | 1,260 | 1,625 | FDTD | 4.62 |
Polymethyl Methacrylate (PMMA) | Air | 1.042 | 0.578 | -34.299999 | 85.300003 | 5 | 0.000012 | 0.21 | 1.65659 | 1.28822 | 0.655 | 1.878 | 1.8857 | 1.88955 | 0.000032 | 72.830002 | 30.379999 | 0.000001 | 9.69 | 9.37 | 9.36 | 1,260 | 1,625 | FDTD | 0.32 |
Polymethyl Methacrylate (PMMA) | Air | 1.109 | 0.338 | -3.2 | 181.399994 | 5 | 0.000009 | 0.2 | 1.70707 | 1.45343 | 2.392 | 3.36 | 1.7152 | 1.72326 | 0.000044 | 75.209999 | 18.879999 | 0.000001 | 8.6 | 8.31 | 8.16 | 1,260 | 1,625 | FDTD | 4.24 |
SU-8 | Air | 1.795 | 0.448 | -43.200001 | 166.5 | 1 | 0.000007 | 0.3 | 1.96937 | 1.49062 | 0.212 | 0.776 | 1.75664 | 1.76644 | 0.000047 | 89.82 | 20.07 | 0.000005 | 2.04 | 1.7 | 1.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.76 |
Silicon Dioxide (SiO₂) | Air | 1.118 | 0.372 | -44.299999 | 124 | 1 | 0.000001 | 1.47 | 1.96749 | 1.25964 | 0.747 | 1.583 | 1.48923 | 1.49859 | 0.000056 | 80.989998 | 67.010002 | 0.000002 | 9.94 | 9.84 | 9.59 | 1,260 | 1,625 | FDTD | 3.2 |
Silicon Dioxide (SiO₂) | Air | 0.682 | 0.576 | -26.9 | 156.5 | 1 | 0.000001 | 1.36 | 1.52121 | 1.05387 | 2.24 | 3.256 | 1.40002 | 1.40845 | 0.000046 | 72.459999 | 59.419998 | 0.000001 | 1.29 | 0.89 | 1.07 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.46 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.683 | 0.469 | 19.4 | 192.5 | 10 | 0.000003 | 16.639999 | 1.93338 | 1.46222 | 2.137 | 2.485 | 1.86786 | 1.87469 | 0.000039 | 75.949997 | 24.5 | 0.000002 | 7.42 | 7.29 | 7.04 | 1,260 | 1,625 | FDTD | 4 |
Silicon Dioxide (SiO₂) | Air | 1.441 | 0.698 | -5.6 | 149.899994 | 10 | 0.000001 | 1.45 | 1.80193 | 1.34803 | 1.539 | 2.508 | 1.59688 | 1.60052 | 0.000023 | 84.220001 | 28.639999 | 0.000002 | 6.28 | 6 | 6.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.22 |
SU-8 | Air | 1.49 | 0.227 | -12.9 | 156.300003 | 1 | 0.000012 | 0.2 | 1.46615 | 1.21842 | 1.085 | 1.712 | 1.72551 | 1.73415 | 0.000051 | 71.190002 | 32.68 | 0.000002 | 4.51 | 4.09 | 4.27 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.62 |
Polydimethylsiloxane (PDMS) | Air | 0.526 | 0.574 | 12 | 175.5 | 10 | 0.000256 | 0.16 | 1.85494 | 1.06472 | 0.336 | 0.914 | 1.73792 | 1.74686 | 0.000055 | 58.040001 | 60.200001 | 0.000002 | 3.19 | 2.71 | 2.89 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.14 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.6 | 0.555 | -37.599998 | 141.699997 | 1 | 0.000244 | 0.17 | 1.96253 | 1.05093 | 0.198 | 1 | 1.908 | 1.91796 | 0.000056 | 85.809998 | 84.910004 | 0.000003 | 5.9 | 5.51 | 5.69 | 1,260 | 1,625 | FDTD | 0.76 |
Silicon Dioxide (SiO₂) | Air | 0.553 | 0.483 | -46.900002 | 113.199997 | 5 | 0.000001 | 1.41 | 1.72617 | 1.24122 | 1.253 | 1.357 | 1.45878 | 1.46115 | 0.000015 | 60.400002 | 61.049999 | 0.000003 | 1 | 0.66 | 0.85 | 1,260 | 1,625 | FDTD | 1.18 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.126 | 0.766 | -21.6 | 179.5 | 1 | 0.000001 | 1.3 | 1.72131 | 1.45418 | 1.678 | 3.16 | 1.89947 | 1.90865 | 0.000046 | 81.629997 | 17.93 | 0.000001 | 3.86 | 3.52 | 3.49 | 1,260 | 1,625 | FDTD | 3.01 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.232 | 0.77 | -35.200001 | 176.5 | 5 | 0.000003 | 19.780001 | 1.95624 | 1.0724 | 0.726 | 1.661 | 1.89446 | 1.90363 | 0.000043 | 89.779999 | 58.389999 | 0.000004 | 2.49 | 2.02 | 2.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.57 |
Silicon Nitride (Si₃N₄) | Air | 1.623 | 0.31 | -4.1 | 189.800003 | 5 | 0.000003 | 16.02 | 1.6892 | 1.44223 | 2.497 | 2.796 | 1.81541 | 1.82437 | 0.000046 | 59.200001 | 15.77 | 0.000004 | 8.74 | 8.58 | 8.56 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.2 |
Polydimethylsiloxane (PDMS) | Air | 1.965 | 0.653 | -45.700001 | 127.599998 | 1 | 0.0002 | 0.19 | 1.66065 | 1.38639 | 2.333 | 2.776 | 1.94064 | 1.94471 | 0.000023 | 58.549999 | 12.09 | 0.000004 | 4.75 | 4.44 | 4.52 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.3 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.922 | 0.834 | 12.4 | 95.199997 | 10 | 0.000003 | 15.86 | 1.73505 | 1.48458 | 1.67 | 2.15 | 1.86571 | 1.86952 | 0.000046 | 73.709999 | 16.66 | 0.000003 | 5.15 | 5.03 | 5.02 | 1,260 | 1,625 | FDTD | 1.03 |
Silicon Dioxide (SiO₂) | Air | 0.585 | 0.602 | 19.299999 | 173.800003 | 1 | 0.000001 | 1.4 | 1.47699 | 1.25402 | 0.525 | 0.665 | 1.74314 | 1.75309 | 0.000064 | 89.480003 | 12.55 | 0.000004 | 7.71 | 7.46 | 7.28 | 1,260 | 1,625 | FDTD | 3.33 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.804 | 0.83 | -23.299999 | 94.800003 | 5 | 0.000133 | 0.16 | 1.49259 | 1.13078 | 2.407 | 3.467 | 1.82136 | 1.83027 | 0.000075 | 52.369999 | 28.780001 | 0.000001 | 5.78 | 5.63 | 5.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.89 |
Silicon Dioxide (SiO₂) | Air | 1.225 | 0.75 | -44 | 181.300003 | 10 | 0.000001 | 1.41 | 1.61247 | 1.23624 | 1.704 | 2.868 | 1.5635 | 1.57087 | 0.000033 | 84.07 | 19.809999 | 0.000002 | 7.19 | 6.99 | 6.76 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.52 |
Silicon Dioxide (SiO₂) | Air | 1.754 | 0.783 | -27.9 | 97.199997 | 10 | 0.000001 | 1.46 | 1.84569 | 1.48927 | 1.03 | 1.633 | 1.49188 | 1.49617 | 0.000034 | 88.110001 | 23.52 | 0.000002 | 1.42 | 1.32 | 1.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.05 |
SU-8 | Silicon Dioxide (SiO₂) | 1.278 | 0.746 | 15.6 | 199.600006 | 10 | 0.000007 | 0.22 | 1.78766 | 1.4023 | 0.275 | 0.691 | 1.91003 | 1.9163 | 0.000034 | 70.400002 | 60.669998 | 0.000002 | 7.55 | 7.23 | 7.38 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.47 |
SU-8 | Silicon Dioxide (SiO₂) | 1.261 | 0.423 | -14.9 | 102.400002 | 10 | 0.00001 | 0.25 | 1.62817 | 1.4685 | 1.008 | 1.954 | 1.67786 | 1.68417 | 0.000054 | 67.209999 | 55.150002 | 0.000002 | 1.43 | 0.97 | 1.06 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.99 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.29 | 0.207 | -22.799999 | 153.399994 | 1 | 0.000001 | 1.4 | 1.65673 | 1.1807 | 2.485 | 2.598 | 1.59506 | 1.60116 | 0.000035 | 68.93 | 87.769997 | 0.000004 | 9.79 | 9.62 | 9.44 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.97 |
SU-8 | Air | 0.702 | 0.482 | -14.9 | 94.099998 | 1 | 0.00001 | 0.26 | 1.65872 | 1.05581 | 1.885 | 2.124 | 1.82707 | 1.83388 | 0.000062 | 58.310001 | 60.549999 | 0.000003 | 6.33 | 6.17 | 6.16 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.04 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.139 | 0.465 | -14.8 | 157.899994 | 5 | 0.000001 | 1.44 | 1.63313 | 1.49319 | 1.586 | 1.831 | 1.75899 | 1.76893 | 0.000058 | 82.57 | 39.689999 | 0.000003 | 6.31 | 6.03 | 6.2 | 1,260 | 1,625 | FDTD | 1.84 |
SU-8 | Air | 0.758 | 0.246 | -0.1 | 190.699997 | 10 | 0.00001 | 0.24 | 1.86502 | 1.27099 | 0.199 | 1.414 | 1.48246 | 1.48502 | 0.000013 | 61.400002 | 16.190001 | 0.000004 | 8.48 | 8.05 | 8.14 | 1,260 | 1,625 | FDTD | 4.47 |
Polydimethylsiloxane (PDMS) | Air | 1.97 | 0.54 | -36.5 | 190.199997 | 10 | 0.000261 | 0.18 | 1.51562 | 1.09266 | 2.053 | 2.321 | 1.73696 | 1.74131 | 0.000019 | 71.370003 | 70.970001 | 0.000002 | 6.61 | 6.19 | 6.19 | 1,260 | 1,625 | FDTD | 3.81 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.584 | 0.81 | -41.700001 | 90.400002 | 1 | 0.000003 | 17.610001 | 1.65833 | 1.30649 | 1.302 | 2.594 | 1.98646 | 1.9917 | 0.00004 | 88.730003 | 47.220001 | 0.000004 | 5.56 | 5.36 | 5.07 | 1,260 | 1,625 | FDTD | 0.8 |
Polymethyl Methacrylate (PMMA) | Air | 1.384 | 0.974 | -42.900002 | 96.300003 | 1 | 0.000011 | 0.21 | 1.63058 | 1.38793 | 1.688 | 2.546 | 1.71912 | 1.72145 | 0.000017 | 70.089996 | 78.690002 | 0.000002 | 8.85 | 8.5 | 8.75 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.5 |
Silicon Dioxide (SiO₂) | Air | 0.561 | 0.883 | 9.8 | 106.699997 | 10 | 0.000001 | 1.4 | 1.53042 | 1.12917 | 1.91 | 2.82 | 1.85357 | 1.85828 | 0.000049 | 69.25 | 67.639999 | 0.000002 | 1.49 | 1.01 | 1.04 | 1,260 | 1,625 | FDTD | 2.68 |
SU-8 | Air | 1.978 | 0.548 | -7.9 | 84.900002 | 10 | 0.000009 | 0.29 | 1.78786 | 1.47544 | 0.591 | 1.357 | 1.9401 | 1.94358 | 0.000038 | 52.419998 | 68.059998 | 0.000003 | 5.45 | 5.31 | 5.33 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.93 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.887 | 0.677 | -45.700001 | 147.199997 | 5 | 0.000003 | 19.059999 | 1.88393 | 1.22501 | 2.45 | 3.705 | 1.99233 | 2.00183 | 0.000049 | 73.239998 | 78.790001 | 0.000005 | 9.39 | 8.95 | 9.19 | 1,260 | 1,625 | FDTD | 1.23 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 0.795 | 0.947 | 1.3 | 115.199997 | 10 | 0.000251 | 0.16 | 1.8258 | 1.31531 | 1.49 | 2.455 | 1.67664 | 1.67885 | 0.000019 | 55.509998 | 51.66 | 0.000003 | 3.06 | 2.58 | 2.91 | 1,260 | 1,625 | FDTD | 3.7 |
SU-8 | Silicon Dioxide (SiO₂) | 0.845 | 0.447 | -10.1 | 183.899994 | 5 | 0.000009 | 0.22 | 1.50452 | 1.0991 | 0.713 | 0.859 | 1.85642 | 1.86127 | 0.000025 | 89.739998 | 95.239998 | 0.000004 | 8.05 | 7.68 | 7.88 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.6 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.148 | 0.872 | -11.8 | 125.900002 | 1 | 0.000267 | 0.2 | 1.4013 | 1.12025 | 1.952 | 2.923 | 1.73511 | 1.74378 | 0.000063 | 78.580002 | 76.699997 | 0.000003 | 8 | 7.77 | 7.58 | 1,260 | 1,625 | FDTD | 0.49 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.033 | 0.256 | 13.1 | 145.699997 | 5 | 0.000013 | 0.22 | 1.98583 | 1.48445 | 2.468 | 3.914 | 1.80319 | 1.81045 | 0.000055 | 83.089996 | 54.75 | 0.000003 | 1.06 | 0.7 | 0.7 | 1,260 | 1,625 | FDTD | 4.59 |
Polydimethylsiloxane (PDMS) | Air | 1.106 | 0.285 | -33.5 | 116.300003 | 10 | 0.000291 | 0.16 | 1.69633 | 1.08896 | 2.298 | 3.046 | 1.97735 | 1.98399 | 0.000044 | 51.84 | 41.16 | 0.000005 | 7.55 | 7.22 | 7.36 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.98 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.855 | 0.601 | 15.5 | 172.800003 | 10 | 0.000001 | 1.33 | 1.72215 | 1.13744 | 1.629 | 1.987 | 1.98165 | 1.983 | 0.000009 | 60.200001 | 28.629999 | 0.000001 | 0.77 | 0.28 | 0.67 | 1,260 | 1,625 | FDTD | 4.4 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.81 | 0.939 | -34.599998 | 186.100006 | 5 | 0.000001 | 1.47 | 1.71816 | 1.45209 | 2.906 | 3.798 | 1.55468 | 1.55873 | 0.000018 | 72.57 | 20.940001 | 0.000004 | 6.56 | 6.46 | 6.24 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.82 |
Polymethyl Methacrylate (PMMA) | Air | 0.827 | 0.517 | -28.700001 | 122.599998 | 5 | 0.000009 | 0.21 | 1.65963 | 1.13551 | 1.378 | 1.84 | 1.60427 | 1.60801 | 0.000025 | 72.610001 | 31.74 | 0.000001 | 8.19 | 7.96 | 8.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.78 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.861 | 0.805 | -35.700001 | 196.100006 | 10 | 0.00001 | 0.22 | 1.4087 | 1.41717 | 1.898 | 2.087 | 1.42375 | 1.43325 | 0.000041 | 52.560001 | 68.790001 | 0.000003 | 2.05 | 1.84 | 1.8 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.52 |
SU-8 | Silicon Dioxide (SiO₂) | 0.948 | 0.355 | -47.299999 | 193.399994 | 10 | 0.000008 | 0.22 | 1.42046 | 1.13195 | 0.255 | 1.373 | 1.83143 | 1.83255 | 0.000005 | 54.650002 | 81.139999 | 0.000001 | 0.8 | 0.68 | 0.53 | 1,260 | 1,625 | FDTD | 3.92 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.747 | 0.933 | -11.6 | 121.300003 | 1 | 0.000001 | 1.35 | 1.53005 | 1.21709 | 1.465 | 2.815 | 1.9262 | 1.93156 | 0.00004 | 59.470001 | 88.379997 | 0.000001 | 5.34 | 5.18 | 4.93 | 1,260 | 1,625 | FDTD | 4.17 |
SU-8 | Air | 0.54 | 0.249 | 5.2 | 188.699997 | 10 | 0.000009 | 0.27 | 1.62873 | 1.0676 | 0.307 | 0.739 | 1.74948 | 1.75211 | 0.000014 | 56.869999 | 33.279999 | 0.000002 | 4.42 | 4.04 | 4.23 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.06 |
Silicon Dioxide (SiO₂) | Air | 1.093 | 0.901 | -21.299999 | 100.699997 | 5 | 0.000001 | 1.42 | 1.50844 | 1.08437 | 0.395 | 1.332 | 1.85245 | 1.85642 | 0.000033 | 59.41 | 42.549999 | 0.000003 | 8.12 | 7.72 | 7.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.42 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 0.912 | 0.63 | -27 | 137.600006 | 10 | 0.000015 | 0.21 | 1.43144 | 1.35712 | 2.353 | 3.73 | 1.98335 | 1.99173 | 0.000051 | 52.799999 | 21 | 0.000001 | 9.24 | 9.03 | 8.96 | 1,260 | 1,625 | FDTD | 3.23 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.586 | 0.611 | -30.200001 | 178.300003 | 1 | 0.000201 | 0.19 | 1.68029 | 1.10228 | 0.127 | 1.599 | 1.8905 | 1.89517 | 0.000022 | 70.260002 | 69.730003 | 0.000004 | 6.76 | 6.55 | 6.33 | 1,260 | 1,625 | FDTD | 0.59 |
SU-8 | Silicon Dioxide (SiO₂) | 0.587 | 0.876 | -43.700001 | 192.100006 | 1 | 0.000009 | 0.24 | 1.50627 | 1.31637 | 0.608 | 1.757 | 1.50923 | 1.51279 | 0.000015 | 56.869999 | 86.370003 | 0.000004 | 5.15 | 4.95 | 4.77 | 1,260 | 1,625 | Finite Element Method (FEM) | 0.78 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.967 | 0.645 | 10.6 | 168.199997 | 5 | 0.000001 | 1.31 | 1.94217 | 1.15092 | 1.1 | 1.817 | 1.97957 | 1.98441 | 0.000031 | 77.529999 | 52.650002 | 0.000002 | 1.36 | 1 | 1.02 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.63 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.541 | 0.994 | 2.8 | 89.900002 | 1 | 0.000001 | 1.34 | 1.8431 | 1.08107 | 1.585 | 2.534 | 1.54018 | 1.5471 | 0.000079 | 55.91 | 92.120003 | 0.000004 | 4.43 | 4.12 | 4.14 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.76 |
Polydimethylsiloxane (PDMS) | Air | 0.815 | 0.574 | 0 | 169.600006 | 1 | 0.000132 | 0.16 | 1.60689 | 1.38391 | 0.91 | 1.328 | 1.78433 | 1.79123 | 0.000041 | 73.629997 | 46.73 | 0.000003 | 5.99 | 5.79 | 5.6 | 1,260 | 1,625 | FDTD | 1.17 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.874 | 0.93 | -5.7 | 152.100006 | 10 | 0.000014 | 0.23 | 1.86108 | 1.08874 | 2.026 | 2.925 | 1.7463 | 1.75046 | 0.000026 | 57.84 | 28.059999 | 0.000004 | 1.05 | 0.7 | 0.88 | 1,260 | 1,625 | FDTD | 0.71 |
SU-8 | Air | 1.864 | 0.92 | -8.2 | 168.100006 | 5 | 0.00001 | 0.22 | 1.80502 | 1.32421 | 1.52 | 2.26 | 1.95406 | 1.95881 | 0.000027 | 68.25 | 66.18 | 0.000001 | 8.2 | 7.82 | 7.95 | 1,260 | 1,625 | FDTD | 3.59 |
SU-8 | Air | 0.787 | 0.568 | 8.2 | 86.099998 | 1 | 0.000012 | 0.26 | 1.80196 | 1.38075 | 1.334 | 2.796 | 1.63903 | 1.64725 | 0.000106 | 54.860001 | 99.059998 | 0.000003 | 9.82 | 9.45 | 9.48 | 1,260 | 1,625 | Finite Element Method (FEM) | 2.17 |
SU-8 | Silicon Dioxide (SiO₂) | 1.401 | 0.442 | -27.6 | 176.899994 | 10 | 0.000006 | 0.21 | 1.75208 | 1.33627 | 2.849 | 3.061 | 1.97766 | 1.98358 | 0.000029 | 51.16 | 21.690001 | 0.000002 | 9.68 | 9.3 | 9.57 | 1,260 | 1,625 | FDTD | 0.98 |
Polymethyl Methacrylate (PMMA) | Air | 1.824 | 0.517 | -6.8 | 96.099998 | 1 | 0.000013 | 0.25 | 1.8329 | 1.42153 | 2.791 | 3.251 | 1.97654 | 1.9799 | 0.000033 | 78.940002 | 67.279999 | 0.000003 | 1.91 | 1.57 | 1.8 | 1,260 | 1,625 | FDTD | 0.3 |
Polydimethylsiloxane (PDMS) | Air | 1.689 | 0.441 | -2.4 | 86.300003 | 10 | 0.000161 | 0.18 | 1.98192 | 1.14349 | 2.764 | 3.506 | 1.50323 | 1.50931 | 0.000069 | 78.169998 | 80.260002 | 0.000001 | 7.65 | 7.16 | 7.17 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.67 |
Silicon Nitride (Si₃N₄) | Air | 1.414 | 0.566 | -35.200001 | 167.800003 | 1 | 0.000003 | 17.870001 | 1.54004 | 1.24006 | 2.263 | 3.578 | 1.85124 | 1.85687 | 0.000028 | 50.779999 | 40.57 | 0.000001 | 5.48 | 5.15 | 5.37 | 1,260 | 1,625 | Finite Element Method (FEM) | 4.03 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.31 | 0.296 | -4.8 | 83.699997 | 10 | 0.00001 | 0.19 | 1.85346 | 1.0092 | 2.744 | 2.899 | 1.67885 | 1.68703 | 0.000092 | 63.66 | 65.099998 | 0.000002 | 9.79 | 9.53 | 9.43 | 1,260 | 1,625 | FDTD | 4.04 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 0.593 | 0.47 | -1.5 | 163.699997 | 1 | 0.000003 | 16.84 | 1.744 | 1.15176 | 1.687 | 2.114 | 1.92952 | 1.93761 | 0.000049 | 80.690002 | 66.550003 | 0.000004 | 5.4 | 5.26 | 5.04 | 1,260 | 1,625 | FDTD | 4.31 |
Silicon Nitride (Si₃N₄) | Silicon Dioxide (SiO₂) | 1.267 | 0.237 | -47.799999 | 89.099998 | 5 | 0.000003 | 16.5 | 1.96451 | 1.0827 | 2.932 | 3.839 | 1.98344 | 1.98702 | 0.000026 | 74.629997 | 27.360001 | 0.000001 | 7.34 | 6.98 | 7.1 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.53 |
SU-8 | Silicon Dioxide (SiO₂) | 1.942 | 0.459 | -34.900002 | 179.5 | 5 | 0.000007 | 0.22 | 1.84836 | 1.23208 | 1.709 | 1.932 | 1.60271 | 1.60911 | 0.00003 | 76.860001 | 75.139999 | 0.000002 | 7.94 | 7.81 | 7.69 | 1,260 | 1,625 | FDTD | 3.88 |
Polymethyl Methacrylate (PMMA) | Silicon Dioxide (SiO₂) | 1.968 | 0.901 | -31.299999 | 148.199997 | 1 | 0.000015 | 0.24 | 1.52987 | 1.38168 | 0.142 | 1.519 | 1.57556 | 1.5795 | 0.000022 | 82.949997 | 85.699997 | 0.000003 | 1.23 | 0.87 | 1.04 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.26 |
Polymethyl Methacrylate (PMMA) | Air | 1.124 | 0.971 | -45.900002 | 192.300003 | 5 | 0.000011 | 0.25 | 1.67097 | 1.07688 | 0.15 | 1.321 | 1.5919 | 1.59969 | 0.000033 | 73.599998 | 28.09 | 0.000002 | 9.35 | 8.92 | 8.86 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.28 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.882 | 0.667 | -15.5 | 130.5 | 5 | 0.000001 | 1.36 | 1.97382 | 1.29689 | 2.082 | 2.963 | 1.81544 | 1.81987 | 0.00003 | 50.59 | 44.32 | 0.000003 | 4.92 | 4.5 | 4.58 | 1,260 | 1,625 | FDTD | 3.42 |
Silicon Dioxide (SiO₂) | Air | 1.477 | 0.794 | -29.4 | 153 | 1 | 0.000001 | 1.34 | 1.65394 | 1.16543 | 0.97 | 1.485 | 1.65839 | 1.6628 | 0.000024 | 66.419998 | 78.290001 | 0.000003 | 6.98 | 6.5 | 6.82 | 1,260 | 1,625 | FDTD | 2.74 |
Polydimethylsiloxane (PDMS) | Silicon Dioxide (SiO₂) | 1.192 | 0.802 | -48.099998 | 120.099998 | 10 | 0.000224 | 0.19 | 1.76306 | 1.41907 | 1.819 | 1.975 | 1.44498 | 1.45421 | 0.000055 | 77.519997 | 83.550003 | 0.000002 | 9.81 | 9.36 | 9.69 | 1,260 | 1,625 | Finite Element Method (FEM) | 3.4 |
SU-8 | Silicon Dioxide (SiO₂) | 1.968 | 0.817 | -37.200001 | 148.300003 | 5 | 0.000007 | 0.24 | 1.93991 | 1.27465 | 0.575 | 0.724 | 1.84129 | 1.84444 | 0.000017 | 51.959999 | 93.309998 | 0.000003 | 5.63 | 5.39 | 5.24 | 1,260 | 1,625 | FDTD | 2.8 |
Silicon Dioxide (SiO₂) | Air | 1.001 | 0.928 | -4.6 | 123.400002 | 5 | 0.000001 | 1.38 | 1.81466 | 1.48226 | 1.548 | 2.325 | 1.83491 | 1.83739 | 0.000019 | 68.309998 | 19.370001 | 0.000004 | 5.56 | 5.4 | 5.26 | 1,260 | 1,625 | FDTD | 2.72 |
Polymethyl Methacrylate (PMMA) | Air | 1.713 | 0.772 | -30.700001 | 111.300003 | 5 | 0.000011 | 0.2 | 1.77467 | 1.18903 | 1.091 | 2.317 | 1.62022 | 1.62285 | 0.000019 | 87.139999 | 77.269997 | 0.000003 | 9.79 | 9.6 | 9.4 | 1,260 | 1,625 | FDTD | 2.32 |
Silicon Dioxide (SiO₂) | Silicon Dioxide (SiO₂) | 1.812 | 0.403 | -47.099998 | 133.399994 | 5 | 0.000001 | 1.33 | 1.43069 | 1.12542 | 1.642 | 2.765 | 1.45022 | 1.45172 | 0.000008 | 83.629997 | 33.619999 | 0.000004 | 3.5 | 3.34 | 3.1 | 1,260 | 1,625 | FDTD | 0.71 |
Silicon Nitride (Si₃N₄) | Air | 1.982 | 0.713 | -21.200001 | 161.800003 | 5 | 0.000003 | 18.299999 | 1.93195 | 1.45144 | 0.386 | 1.226 | 1.76098 | 1.76482 | 0.000021 | 72.769997 | 74.949997 | 0.000004 | 4.94 | 4.72 | 4.61 | 1,260 | 1,625 | FDTD | 3.36 |
Silicon Nitride (Si₃N₄) | Air | 0.843 | 0.767 | 16.700001 | 141.399994 | 1 | 0.000003 | 18.09 | 1.72267 | 1.39973 | 1.992 | 3.068 | 1.86681 | 1.87124 | 0.000036 | 55.869999 | 42.66 | 0.000001 | 4.22 | 3.97 | 3.9 | 1,260 | 1,625 | Finite Element Method (FEM) | 1.54 |
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