waveguide_material
stringclasses
5 values
cladding_material
stringclasses
2 values
waveguide_width
float32
0.5
2
waveguide_height
float32
0.2
1
temperature_min
float32
-50
20
temperature_max
float32
80
200
temperature_step
float32
1
10
thermal_expansion_coefficient
float32
0
0
thermal_conductivity
float32
0.15
20
refractive_index_core
float32
1.4
2
refractive_index_cladding
float32
1
1.5
propagation_loss_min
float32
0.1
3
propagation_loss_max
float32
0.21
4.5
effective_index_min
float32
1.4
2
effective_index_max
float32
1.4
2.01
dn_dT
float32
0
0
thermal_tuning_efficiency
float32
50
90
thermal_stress
float32
10
100
strain_rate
float32
0
0
optical_power_input
float32
0.5
10
optical_power_output_min
float32
0
9.89
optical_power_output_max
float32
0
9.89
wavelength_min
float32
1.26k
1.26k
wavelength_max
float32
1.63k
1.63k
simulation_model
stringclasses
2 values
measurement_uncertainty
float32
0.1
5
SU-8
Air
1.432
0.873
-38
103.800003
10
0.000007
0.28
1.54435
1.2585
1.413
2.594
1.41508
1.41632
0.000009
81.370003
51.509998
0.000004
0.78
0.54
0.42
1,260
1,625
FDTD
2.7
Polymethyl Methacrylate (PMMA)
Air
0.542
0.765
-39
174.699997
5
0.000009
0.22
1.6115
1.4612
2.438
3.278
1.93035
1.9316
0.000006
60.91
64.019997
0.000002
8.2
7.86
7.85
1,260
1,625
Finite Element Method (FEM)
1.91
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.867
0.238
-37.599998
149.300003
5
0.000009
0.21
1.48338
1.41072
0.453
1.832
1.79619
1.80271
0.000035
72.290001
30.66
0.000002
2.43
2.22
2.27
1,260
1,625
Finite Element Method (FEM)
1.05
Polydimethylsiloxane (PDMS)
Air
0.867
0.946
-19.4
140.100006
5
0.000244
0.16
1.51467
1.20065
0.961
1.874
1.80329
1.80439
0.000007
81.879997
44.16
0.000004
9.62
9.49
9.34
1,260
1,625
FDTD
2.39
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.565
0.385
-7
97.800003
10
0.000001
1.48
1.99643
1.00261
2.433
3.123
1.86752
1.8728
0.00005
65.449997
81.349998
0.000002
0.64
0.43
0.35
1,260
1,625
FDTD
2.3
Silicon Nitride (Si₃N₄)
Air
1.169
0.332
9.3
135.300003
5
0.000003
19.18
1.96413
1.31906
0.149
1.108
1.53665
1.54368
0.000056
60.650002
10.42
0.000002
2.6
2.28
2.42
1,260
1,625
Finite Element Method (FEM)
0.9
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.504
0.566
-32.299999
141.199997
10
0.000001
1.47
1.40306
1.31167
2.496
3.719
1.71316
1.72069
0.000043
67.010002
78.730003
0.000004
0.81
0.69
0.41
1,260
1,625
Finite Element Method (FEM)
0.89
Silicon Dioxide (SiO₂)
Air
1.706
0.226
-7
196.300003
10
0.000001
1.46
1.84633
1.06026
0.84
1.794
1.96407
1.96984
0.000028
56.049999
83.779999
0.000004
2.32
1.99
2.01
1,260
1,625
Finite Element Method (FEM)
0.69
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.594
0.48
-12.1
175.600006
5
0.000187
0.19
1.78609
1.27662
1.07
2.133
1.67889
1.68047
0.000008
80.519997
78.989998
0.000002
8.33
7.92
7.85
1,260
1,625
Finite Element Method (FEM)
0.22
Polymethyl Methacrylate (PMMA)
Air
1.731
0.535
19.200001
160.800003
10
0.00001
0.21
1.584
1.49912
1.899
2.169
1.669
1.67057
0.000011
72.379997
60.540001
0.000003
7.66
7.5
7.41
1,260
1,625
Finite Element Method (FEM)
2.44
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.787
0.787
-50
160.300003
5
0.000013
0.24
1.4484
1.03115
2.794
4.014
1.94331
1.94862
0.000025
75.900002
53.66
0.000003
4.44
4.2
4.25
1,260
1,625
FDTD
4.44
Polymethyl Methacrylate (PMMA)
Air
1.984
0.518
-7.4
116.800003
5
0.000009
0.23
1.48671
1.39817
2.399
3.494
1.54347
1.55041
0.000056
73.699997
34.959999
0.000003
4.21
3.98
4.07
1,260
1,625
Finite Element Method (FEM)
3.06
Silicon Nitride (Si₃N₄)
Air
1.427
0.229
-42
175.800003
5
0.000003
15.33
1.82955
1.45951
2.872
3.668
1.7505
1.75278
0.00001
83.540001
48.470001
0.000003
7.34
6.89
6.89
1,260
1,625
Finite Element Method (FEM)
2.12
SU-8
Silicon Dioxide (SiO₂)
1.848
0.567
-10.5
116.300003
5
0.000008
0.29
1.87609
1.10077
1.032
1.827
1.62833
1.63057
0.000018
64.339996
80.449997
0.000001
2.33
2.17
2.01
1,260
1,625
FDTD
2.19
SU-8
Silicon Dioxide (SiO₂)
1.846
0.91
-21.700001
114.300003
10
0.000011
0.24
1.86502
1.25539
2.827
3.395
1.40164
1.40279
0.000008
62.57
31.32
0.000004
3.73
3.49
3.27
1,260
1,625
FDTD
2.76
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.995
0.391
12.1
125.5
1
0.00012
0.18
1.73712
1.04844
1.649
2.95
1.68471
1.69335
0.000076
62.720001
73.410004
0
2.87
2.67
2.47
1,260
1,625
FDTD
2.92
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.902
0.696
-30.200001
136.899994
1
0.000001
1.32
1.54444
1.04653
0.976
1.35
1.40481
1.41372
0.000053
87.980003
19.139999
0.000001
2.44
2.27
2.28
1,260
1,625
FDTD
2.64
Silicon Nitride (Si₃N₄)
Air
1.691
0.239
-42.299999
171.300003
1
0.000003
17.23
1.90314
1.00172
1.61
2.27
1.59934
1.60233
0.000014
84.809998
69.25
0.000002
8.68
8.32
8.41
1,260
1,625
Finite Element Method (FEM)
4.82
Silicon Dioxide (SiO₂)
Air
0.694
0.645
12
174.800003
1
0.000001
1.3
1.54956
1.19027
1.943
2.547
1.7158
1.71954
0.000023
84.339996
60.32
0.000004
3.8
3.5
3.51
1,260
1,625
FDTD
0.65
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.564
0.446
14.3
105.199997
10
0.000003
19.4
1.50239
1.26085
1.897
2.952
1.99462
1.99797
0.000037
85.269997
97.870003
0.000003
4.28
4.16
3.87
1,260
1,625
FDTD
4.77
Polydimethylsiloxane (PDMS)
Air
0.562
0.84
-12.3
84.900002
1
0.000289
0.16
1.71617
1.46471
0.908
1.937
1.75972
1.76812
0.000086
55.200001
22.870001
0.000004
6.51
6.26
6.32
1,260
1,625
Finite Element Method (FEM)
4.42
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.526
0.482
-5.6
155.800003
1
0.000015
0.22
1.63011
1.01942
2.769
2.997
1.40998
1.41541
0.000034
78.260002
59.09
0.000001
5.65
5.21
5.48
1,260
1,625
Finite Element Method (FEM)
0.44
Polydimethylsiloxane (PDMS)
Air
1.342
0.687
-30.1
95.5
1
0.000187
0.2
1.55988
1.30856
0.74
1.405
1.97185
1.9801
0.000066
73.849998
88.959999
0.000003
1.28
0.82
0.93
1,260
1,625
FDTD
2.06
Silicon Dioxide (SiO₂)
Air
1.157
0.4
10.3
126
1
0.000001
1.33
1.71058
1.45171
0.517
1.799
1.57039
1.57239
0.000017
61.759998
83.669998
0.000005
2.38
2.07
2.1
1,260
1,625
Finite Element Method (FEM)
4.89
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.236
0.58
-19.9
101.199997
1
0.000001
1.45
1.50053
1.39702
2.364
3.09
1.6747
1.68379
0.000075
83.760002
83.989998
0.000002
8.47
8.28
8.34
1,260
1,625
FDTD
3.72
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.697
0.464
-47
167.300003
10
0.000013
0.21
1.92481
1.08591
2.167
2.94
1.94505
1.9462
0.000005
81.150002
30.83
0.000001
4.17
3.89
4.04
1,260
1,625
FDTD
2.22
Polydimethylsiloxane (PDMS)
Air
1.157
0.708
-8
118.800003
1
0.000159
0.2
1.45307
1.4037
1.876
3.147
1.68514
1.69337
0.000065
57.959999
75.93
0.000001
7.47
7.04
7.3
1,260
1,625
Finite Element Method (FEM)
3.03
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.847
0.272
12.1
192.300003
5
0.000015
0.19
1.75337
1.19111
2.799
4.032
1.62762
1.62995
0.000013
82.099998
35.959999
0.000001
1.77
1.37
1.28
1,260
1,625
Finite Element Method (FEM)
2.39
SU-8
Air
0.665
0.652
-41.900002
120.300003
10
0.000011
0.27
1.4635
1.09854
0.527
1.6
1.88262
1.88774
0.000032
75.349998
99.959999
0.000004
6.53
6.26
6.39
1,260
1,625
Finite Element Method (FEM)
3.36
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.67
0.397
-1.4
96.599998
10
0.000003
15.7
1.60935
1.32074
1.297
1.591
1.95927
1.96535
0.000062
56.200001
53.77
0.000003
4.5
4.11
4.17
1,260
1,625
FDTD
2.06
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.628
0.726
-39.700001
147.699997
1
0.000013
0.24
1.42243
1.31183
0.749
1.824
1.90411
1.9096
0.000029
63.32
92.620003
0.000001
8.99
8.75
8.76
1,260
1,625
Finite Element Method (FEM)
4.23
SU-8
Air
1.869
0.847
-28.4
170.899994
5
0.000012
0.3
1.85038
1.17823
1.145
2.083
1.96192
1.96617
0.000021
51.200001
59.68
0.000002
3.09
2.6
2.61
1,260
1,625
FDTD
1.74
SU-8
Silicon Dioxide (SiO₂)
1.653
0.647
18.200001
170.300003
10
0.000008
0.23
1.76184
1.23234
1.248
1.553
1.61484
1.62102
0.000041
55.099998
15.33
0
0.94
0.8
0.54
1,260
1,625
Finite Element Method (FEM)
1.88
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.961
0.773
-29.700001
145.800003
10
0.00023
0.17
1.5305
1.06993
2.576
2.772
1.64796
1.64949
0.000009
86.370003
94.230003
0.000001
6.08
5.94
5.72
1,260
1,625
FDTD
3.53
SU-8
Air
1.318
0.271
-45.700001
131.199997
1
0.000007
0.22
1.77061
1.17918
1.492
2.581
1.59794
1.60642
0.000048
65.160004
75.800003
0.000002
5.02
4.75
4.62
1,260
1,625
Finite Element Method (FEM)
3.35
Polymethyl Methacrylate (PMMA)
Air
1.963
0.516
18.200001
109.800003
1
0.000012
0.22
1.97061
1.009
2.511
2.857
1.60299
1.60905
0.000066
78.410004
97.540001
0.000004
3.68
3.47
3.22
1,260
1,625
FDTD
0.92
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.159
0.237
-18.700001
182.5
1
0.000003
17.57
1.82554
1.17724
2.418
2.803
1.91575
1.92072
0.000025
89.440002
99.650002
0.000004
9.73
9.39
9.42
1,260
1,625
Finite Element Method (FEM)
4.24
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.921
0.519
-47.200001
171.800003
1
0.000278
0.15
1.61444
1.41379
1.587
1.97
1.61748
1.62682
0.000043
63.310001
71.239998
0.000002
6.32
6.11
6.1
1,260
1,625
FDTD
4.32
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.584
0.792
15.4
115.199997
1
0.000001
1.34
1.47237
1.18254
1.18
1.77
1.50141
1.50369
0.000023
76.379997
14.78
0.000003
1.14
0.81
0.81
1,260
1,625
Finite Element Method (FEM)
0.34
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.392
0.311
-19.200001
185.600006
10
0.000003
18.65
1.58134
1.21753
2.862
3.571
1.5226
1.52969
0.000035
67.32
53.689999
0.000003
4.26
3.93
4.09
1,260
1,625
Finite Element Method (FEM)
3.54
Silicon Dioxide (SiO₂)
Air
1.468
0.721
-47.299999
85.099998
1
0.000001
1.3
1.76064
1.47572
2.488
3.252
1.83326
1.84321
0.000075
51.360001
10.85
0.000004
7.57
7.24
7.24
1,260
1,625
Finite Element Method (FEM)
2.27
Polydimethylsiloxane (PDMS)
Air
1.482
0.671
14.1
140.100006
1
0.000107
0.19
1.99735
1.00545
0.287
1.083
1.41634
1.42218
0.000046
51.709999
15.47
0.000004
7.11
6.65
6.7
1,260
1,625
FDTD
4.2
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.726
0.748
8.3
142.5
10
0.000001
1.39
1.52572
1.2119
1.364
2.283
1.79149
1.79658
0.000038
89.199997
71.900002
0.000001
2.45
1.97
2
1,260
1,625
Finite Element Method (FEM)
2.72
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.729
0.795
19.9
158.800003
1
0.000224
0.16
1.8985
1.49423
0.172
1.65
1.79008
1.79915
0.000065
78.059998
34.48
0
1.7
1.46
1.47
1,260
1,625
FDTD
2.08
Polymethyl Methacrylate (PMMA)
Air
0.523
0.722
-13.7
135.699997
1
0.000013
0.2
1.678
1.12695
1.247
1.743
1.64281
1.64589
0.000021
89.089996
78.290001
0.000003
9.91
9.61
9.63
1,260
1,625
FDTD
2.25
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.423
0.615
9.3
154.600006
5
0.000012
0.22
1.76035
1.37925
1.44
2.534
1.959
1.96633
0.00005
71.709999
99.949997
0.000003
9.05
8.66
8.72
1,260
1,625
FDTD
1.19
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.08
0.873
11.8
105.5
1
0.000013
0.21
1.72467
1.06699
1.066
2.12
1.70326
1.70639
0.000033
87.389999
23.16
0.000004
6.86
6.71
6.56
1,260
1,625
FDTD
2.99
SU-8
Air
1.464
0.275
18.5
166
10
0.000011
0.21
1.84431
1.37622
0.79
1.869
1.61692
1.62654
0.000065
54.139999
92.480003
0.000002
3.45
3.24
3.22
1,260
1,625
Finite Element Method (FEM)
0.83
SU-8
Air
1.036
0.589
0.8
176.699997
1
0.000009
0.22
1.64665
1.48983
0.362
1.819
1.7568
1.76147
0.000027
54.349998
34.709999
0.000001
7.9
7.4
7.6
1,260
1,625
Finite Element Method (FEM)
1.26
Polydimethylsiloxane (PDMS)
Air
0.877
0.298
7.7
106.900002
5
0.000162
0.18
1.69147
1.18229
2.425
3.817
1.77115
1.77857
0.000075
56.900002
89.620003
0.000001
0.98
0.81
0.8
1,260
1,625
FDTD
1.97
Silicon Nitride (Si₃N₄)
Air
1.432
0.554
-9.5
127.900002
5
0.000003
16.99
1.78666
1.46405
1.356
2.101
1.96632
1.97276
0.000047
72.370003
55.799999
0.000003
2.64
2.48
2.32
1,260
1,625
FDTD
0.13
Polydimethylsiloxane (PDMS)
Air
0.543
0.408
9
189.100006
5
0.000103
0.16
1.43217
1.31558
2.857
3.429
1.57304
1.58062
0.000042
58.18
90.980003
0.000003
7.09
6.76
6.68
1,260
1,625
FDTD
4.07
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.84
0.78
-37.400002
131.699997
5
0.000003
16.379999
1.96723
1.13289
0.356
0.489
1.50855
1.51143
0.000017
79.029999
29.559999
0.000005
8.88
8.43
8.56
1,260
1,625
Finite Element Method (FEM)
1.24
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.758
0.786
-11.5
122.800003
10
0.000101
0.17
1.56322
1.47175
2.642
3.954
1.79261
1.79403
0.000011
67.260002
52.490002
0.000002
2.5
2.35
2.26
1,260
1,625
FDTD
4.44
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.72
0.464
-33.400002
114.599998
5
0.000003
15.41
1.47834
1.43946
1.213
1.912
1.73175
1.73301
0.000009
68.309998
35.720001
0.000003
9.04
8.9
8.85
1,260
1,625
Finite Element Method (FEM)
0.27
Silicon Nitride (Si₃N₄)
Air
1.945
0.779
-17.799999
137
5
0.000003
19.360001
1.704
1.10508
2.955
4.431
1.60632
1.61218
0.000038
86.68
62.330002
0.000005
2.61
2.45
2.12
1,260
1,625
Finite Element Method (FEM)
0.83
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.561
0.324
8.4
91
10
0.000001
1.43
1.53183
1.08996
1.306
2.209
1.719
1.7246
0.000068
86.029999
95.339996
0.000004
2.79
2.55
2.37
1,260
1,625
Finite Element Method (FEM)
4.01
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.847
0.784
-22.4
173.100006
5
0.000121
0.15
1.44505
1.21583
1.924
2.265
1.93168
1.9391
0.000038
61.790001
38.799999
0.000002
3.2
2.82
2.7
1,260
1,625
FDTD
0.12
SU-8
Air
1.187
0.787
-11.5
101.699997
5
0.000011
0.22
1.70983
1.38623
0.324
1.316
1.63814
1.64674
0.000076
63.16
46.849998
0.000004
7.37
7.05
6.98
1,260
1,625
FDTD
3.92
Polymethyl Methacrylate (PMMA)
Air
1.459
0.226
-3.7
144.800003
5
0.000011
0.21
1.8671
1.48565
1.834
2.926
1.50727
1.51656
0.000063
89.120003
25.73
0.000004
8.03
7.8
7.89
1,260
1,625
FDTD
4.27
Silicon Nitride (Si₃N₄)
Air
0.659
0.873
6.9
90.900002
5
0.000003
19.76
1.55303
1.13167
1.844
2.292
1.77296
1.77402
0.000013
55.310001
21.049999
0.000002
5.68
5.25
5.34
1,260
1,625
Finite Element Method (FEM)
2.59
Silicon Nitride (Si₃N₄)
Air
0.645
0.412
-23.9
159
1
0.000003
16.290001
1.99127
1.30633
1.51
2.121
1.95017
1.95347
0.000018
59.189999
70.989998
0.000001
5.55
5.38
5.24
1,260
1,625
FDTD
1.11
Silicon Dioxide (SiO₂)
Air
1.136
0.947
-41.799999
115.699997
1
0.000001
1.38
1.94037
1.26919
0.492
1.287
1.50345
1.50466
0.000008
78.660004
45.220001
0.000003
8.33
8.06
8.03
1,260
1,625
Finite Element Method (FEM)
3.07
Silicon Dioxide (SiO₂)
Air
1.764
0.433
-11.6
189.5
10
0.000001
1.32
1.70183
1.0366
1.145
1.319
1.78936
1.7975
0.00004
86.449997
80.769997
0.000002
5.93
5.67
5.8
1,260
1,625
Finite Element Method (FEM)
1.71
Polymethyl Methacrylate (PMMA)
Air
0.788
0.753
-20.700001
97.800003
10
0.000013
0.23
1.44321
1.23053
0.96
1.459
1.9614
1.96502
0.000031
83.610001
32.860001
0.000002
3.62
3.42
3.41
1,260
1,625
FDTD
0.18
Silicon Nitride (Si₃N₄)
Air
1.54
0.385
-44.200001
153.600006
1
0.000003
19.08
1.79041
1.11925
1.5
2.869
1.8395
1.84229
0.000014
59.939999
74.519997
0.000001
9.18
9
9.01
1,260
1,625
FDTD
2.6
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.751
0.613
-35.299999
91.199997
5
0.000001
1.38
1.50344
1.14514
2.37
3.57
1.78308
1.7899
0.000054
88.660004
57.330002
0.000003
7.95
7.66
7.61
1,260
1,625
FDTD
2.6
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.786
0.951
-16.6
193.5
10
0.000011
0.2
1.73433
1.19436
0.671
1.403
1.556
1.56251
0.000031
62.830002
30.860001
0.000001
1.15
1.05
0.85
1,260
1,625
FDTD
1.88
SU-8
Air
1.472
0.583
14.4
145.800003
1
0.000011
0.29
1.76231
1.03404
1.437
2.537
1.5539
1.56319
0.000071
63.959999
13.6
0.000004
9.04
8.93
8.83
1,260
1,625
FDTD
1.72
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.889
0.607
-1.6
195.5
1
0.000003
18.18
1.71199
1.30497
0.847
2.314
1.52536
1.53213
0.000034
63.970001
85.239998
0.000004
4.33
4.18
3.91
1,260
1,625
FDTD
2.13
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.437
0.38
-26.6
81.900002
1
0.000003
16
1.77907
1.04231
2.834
4.302
1.73779
1.74361
0.000054
54.029999
66.730003
0
2.15
1.78
2
1,260
1,625
FDTD
2.91
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
0.638
0.525
-37.599998
142.100006
5
0.000003
15.41
1.78846
1.05823
0.822
1.863
1.6341
1.63691
0.000016
54.790001
87.559998
0.000003
5.68
5.51
5.55
1,260
1,625
Finite Element Method (FEM)
3.69
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.721
0.327
-34.400002
154.300003
1
0.00001
0.22
1.75563
1.15984
0.533
0.976
1.62046
1.62793
0.00004
88.339996
53.919998
0.000004
3.01
2.59
2.61
1,260
1,625
FDTD
2.56
Polymethyl Methacrylate (PMMA)
Air
0.919
0.879
-14.8
153.899994
5
0.000012
0.24
1.42423
1.24679
1.803
2.723
1.78128
1.79121
0.000059
54.900002
89.690002
0.000005
4.17
3.76
3.83
1,260
1,625
FDTD
0.75
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
1.134
0.578
-42
103.900002
1
0.000001
1.47
1.90832
1.39296
2.361
3.486
1.89036
1.89643
0.000042
81.580002
95.43
0.000003
6.15
5.77
5.74
1,260
1,625
FDTD
0.12
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.747
0.939
-2.8
107.599998
1
0.000014
0.19
1.57458
1.4231
0.281
1.434
1.93954
1.94676
0.000065
80.57
44.41
0.000003
7.89
7.64
7.77
1,260
1,625
Finite Element Method (FEM)
2.31
SU-8
Silicon Dioxide (SiO₂)
0.873
0.291
-21.299999
114.900002
10
0.000012
0.21
1.95713
1.29533
1.021
2.041
1.58268
1.5849
0.000016
54.43
38.029999
0.000005
4.42
4.26
4.31
1,260
1,625
FDTD
4.45
Polymethyl Methacrylate (PMMA)
Air
1.937
0.518
-46.700001
151.699997
1
0.000008
0.24
1.53981
1.13791
1.004
1.504
1.9929
1.9945
0.000008
56.259998
99.699997
0.000004
8.68
8.53
8.36
1,260
1,625
FDTD
4.6
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
0.594
0.812
3.2
157.899994
10
0.000011
0.19
1.59547
1.29814
1.845
2.826
1.63253
1.63701
0.000029
72.07
32.919998
0.000005
4.72
4.25
4.48
1,260
1,625
Finite Element Method (FEM)
4.4
Silicon Dioxide (SiO₂)
Silicon Dioxide (SiO₂)
0.56
0.509
19.9
175.5
10
0.000001
1.39
1.52482
1.06573
2.004
2.183
1.84539
1.85323
0.00005
72.889999
68.510002
0.000001
3.57
3.08
3.37
1,260
1,625
FDTD
4.42
Polymethyl Methacrylate (PMMA)
Air
0.685
0.948
2.4
199
10
0.000014
0.2
1.81264
1.02614
1.862
3.021
1.83231
1.83335
0.000005
85.669998
95.629997
0.000001
7.61
7.32
7.41
1,260
1,625
Finite Element Method (FEM)
0.99
Silicon Dioxide (SiO₂)
Air
1.122
0.262
-35.400002
146.800003
10
0.000001
1.34
1.79577
1.37086
1.247
1.381
1.97249
1.98114
0.000047
56.799999
68.339996
0.000004
4.54
4.4
4.29
1,260
1,625
Finite Element Method (FEM)
1.21
Polymethyl Methacrylate (PMMA)
Air
1.86
0.964
-10.7
125.900002
5
0.000011
0.23
1.80377
1.49969
0.473
0.716
1.56759
1.57168
0.00003
64.459999
65.050003
0.000001
2.86
2.42
2.61
1,260
1,625
FDTD
3.27
SU-8
Silicon Dioxide (SiO₂)
0.637
0.692
4.6
124.699997
10
0.000006
0.23
1.57878
1.19966
2.016
2.22
1.92488
1.92639
0.000013
72.32
85.660004
0.000002
3.37
3.06
2.9
1,260
1,625
FDTD
0.61
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.938
0.951
1.8
122.300003
5
0.000162
0.2
1.72711
1.10206
2.777
3.92
1.76939
1.77674
0.000061
75.970001
67.059998
0.000001
6.61
6.19
6.14
1,260
1,625
Finite Element Method (FEM)
0.95
Silicon Nitride (Si₃N₄)
Air
1.084
0.474
-32.900002
145.300003
10
0.000003
17.139999
1.85523
1.03538
2.243
2.948
1.7615
1.76401
0.000014
58.959999
66.089996
0.000004
2.61
2.38
2.34
1,260
1,625
FDTD
2.69
Polydimethylsiloxane (PDMS)
Air
0.829
0.348
-38.200001
103.599998
5
0.000207
0.17
1.54748
1.14788
0.867
1.034
1.48179
1.48551
0.000026
58.009998
12.04
0.000002
9.8
9.4
9.41
1,260
1,625
FDTD
4.89
SU-8
Silicon Dioxide (SiO₂)
0.516
0.785
-11.8
100.099998
10
0.00001
0.26
1.75979
1.08653
0.318
1.763
1.93853
1.94204
0.000031
69.470001
39.709999
0.000002
1.43
1
1.03
1,260
1,625
FDTD
4.29
Silicon Nitride (Si₃N₄)
Air
1.18
0.962
-0.7
158.199997
10
0.000003
15.61
1.79123
1.43307
2.852
3.848
1.61207
1.61856
0.000041
79.370003
42.580002
0.000001
9.7
9.43
9.27
1,260
1,625
Finite Element Method (FEM)
3.15
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
1.35
0.569
10.4
129.5
10
0.000162
0.19
1.53007
1.33903
2.606
3.9
1.97014
1.97427
0.000035
79.099998
25.129999
0.000004
8.86
8.4
8.56
1,260
1,625
Finite Element Method (FEM)
3.94
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.464
0.627
-17.1
109.5
1
0.000003
17.33
1.61442
1.35358
0.646
1.359
1.40874
1.41458
0.000046
64.389999
30.110001
0
2.74
2.57
2.34
1,260
1,625
Finite Element Method (FEM)
3.17
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.604
0.988
-4.4
196
10
0.000003
16.99
1.99085
1.31352
1.015
1.869
1.83598
1.84177
0.000029
74.169998
68.550003
0.000001
9.6
9.28
9.25
1,260
1,625
FDTD
2.09
Silicon Nitride (Si₃N₄)
Air
0.84
0.973
-23.799999
81.300003
5
0.000003
18.719999
1.60746
1.45774
2.029
2.213
1.95621
1.96225
0.000057
53.450001
80.050003
0.000003
7.74
7.25
7.59
1,260
1,625
FDTD
1.29
Polymethyl Methacrylate (PMMA)
Silicon Dioxide (SiO₂)
1.954
0.315
2.1
94.400002
1
0.000015
0.22
1.46202
1.20482
1.785
3.143
1.64961
1.65419
0.00005
53.959999
84.410004
0.000004
1.06
0.66
0.86
1,260
1,625
FDTD
3.32
Silicon Nitride (Si₃N₄)
Air
0.915
0.495
-35.099998
167
1
0.000003
19.200001
1.75059
1.18386
1.171
2.671
1.81252
1.81876
0.000031
89.660004
68.269997
0.000004
2.87
2.46
2.44
1,260
1,625
Finite Element Method (FEM)
4.01
Silicon Nitride (Si₃N₄)
Air
0.657
0.788
-38.700001
169.5
10
0.000003
18.780001
1.58676
1.11985
2.442
3.304
1.92155
1.92499
0.000017
68.129997
67.730003
0.000004
5.18
4.78
4.8
1,260
1,625
FDTD
3.14
Silicon Nitride (Si₃N₄)
Silicon Dioxide (SiO₂)
1.248
0.563
-22.6
134
1
0.000003
18.969999
1.48786
1.32414
1.748
2.727
1.71926
1.72134
0.000013
77.949997
19.959999
0.000004
2.29
2.01
1.79
1,260
1,625
Finite Element Method (FEM)
1.48
Polydimethylsiloxane (PDMS)
Silicon Dioxide (SiO₂)
0.788
0.887
-46.5
135.199997
1
0.000135
0.2
1.63222
1.08366
0.527
1.39
1.78052
1.78395
0.000019
82.139999
38.369999
0.000001
8.33
7.83
8
1,260
1,625
FDTD
3.41
Polydimethylsiloxane (PDMS)
Air
1.99
0.671
-10.3
82.699997
1
0.000288
0.17
1.54385
1.01856
1.335
1.523
1.83678
1.83827
0.000016
53.18
36.299999
0.000004
7.38
7.2
6.95
1,260
1,625
Finite Element Method (FEM)
4.95
Polymethyl Methacrylate (PMMA)
Air
0.772
0.796
12.2
116.800003
5
0.000013
0.25
1.4797
1.12465
1.44
1.585
1.68227
1.68513
0.000027
81.169998
74
0.000003
3.68
3.49
3.34
1,260
1,625
Finite Element Method (FEM)
3.08